Difference between revisions of "COVID-19 Protocols"

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* Protocol updates
* Protocol updates
** Access control system enforces 2min delay between successive entries  
** Access control system enforces 2 min delay between successive entries  
** Minimize time spent in gowning room
** Minimize time spent in gowning room
** Soap provided at sink in gowning room
** Soap provided at sink in gowning room

Revision as of 08:59, 10 November 2020

Updated 11/1/2020
This page describes updated protocols for LNF Access during Public Health Concerns (COVID-19).

Many steps are driven by University protocols, which will be no less restrictive than what is required by the State of Michigan, but could be more stringent. There are a number of access limitations and social distancing measures, as described below, required to keep everybody safe, and to comply with State and University rules.


What LNF is doing

Additional cleaning

  • Wipes provided in shared areas where PPE is not worn (EECS 1336 CAD room, 14C7 corridor to ROBIN)
  • Daily cleaning of above areas including keyboards, mice, counter space, door handles, light switches, chair armrests. Cleaning of open/general spaces done by building services.
  • Daily cleaning of any LNF space behind access control system. Effective 8/5/2020, and because of the LNF glove policy inside the labs, EHS has approved a single daily wipe down by staff.
    • Daily cleaning by staff once daily Mon-Sat as identified by the reservation of location areas. Equipment could be running unattended, but no users should be present in the lab locations when cleaning is being scheduled/done. If a brief access to the space is needed, please contact the staff member ahead of time.
    • Wipe down of surfaces includes cleaning of microscopes, kiosks keyboard / mouse, touch screen on equipment, chemical cabinets/pass-throughs, push buttons on doors.
    • Cleaning to be done with 70/30 IPA/water solution in spray and squirt bottles, and/or presaturated wipes (90/10 IPA/water or 96/4 IPA/water).
    • Effective 8/31/2020, the regular lab clean schedule has resumed: Lab users can no longer be present inside the cleanroom or ROBIN Mondays and Thursdays 8:30-9:30am. Unattended processes can still run.
  • All users will also clean their work area (bench, equipment, surface) when they come to that lab area and when they leave, using the same wipes and squirt/spray bottles.
  • Safety glasses will no longer be shared, and will be cleaned weekly by LNF staff on lab clean/laundry day (Thursdays).

Air handlers

Air exchanges have been increased to maximum in gowning room, 1448 corridor and 1450 starting 5/15/20.

Onsite staff presence

Onsite presence is still limited to tasks that cannot be completed remotely, such as equipment and infrastructure maintenance. Equipment maintenance will be done from the service aisle whenever possible to minimize presence inside the cleanroom. No office presence. Staff onsite schedule will be listed on the LNF staff calendar (LNF login required).

Staff support of user community

Staff support of the user community will of course continue, but modalities will be adjusted:

  • Effective 8/31/2020, in-person sessions led by staff can resume. If you need any training/support/checkout, please create a Helpdesk ticket on the equipment that you need and we will address requests on a case by case basis as we still work through the backlog of related tickets.
  • The first contact should be done via a Helpdesk ticket as always. Staff will then answer the ticket, and if it is needed, staff and user can schedule a remote or virtual meeting (via Zoom, BlueJeans, Video call etc). This includes tool issues, process questions, or anything you would ask any staff member for help with.
  • LNF is developing online training for many equipment/modules in order to minimize the need for one on one interactions. See User_Resources#Virtual_training_modules
  • There is still no fixed store hours. When you need to pick up an order from the store, create a Helpdesk ticket and onsite staff will coordinate a contactless pick up. Do not make last minute orders, this will take time to coordinate as there will be limited onsite staff.

In-person support

Effective 11/2/2020, practicing with other lab users can resume under the following modified protocol:

  1. Only one lab user can practice with one experienced user at a time.
  2. A Helpdesk ticket is required ahead of time to specify
    • Names of both lab users
    • Equipment where the practice session(s) will occur
    • Dates/times of practice session(s)
  3. Notes about the Helpdesk ticket
    • It can be created by the user practicing or by the experienced user.
    • It can include multiple sessions (multiple tools or days/times), but they all have to be listed in the ticket.
    • It can be used for multiple sessions up to one week. Beyond that time, a new Helpdesk ticket must be created.
    • No staff approval or response is required before the practice session can proceed, but the ticket needs to be created before the session starts.
  4. The two lab users must wear face shields during the whole duration of the practice session
    • Lightweight face shields are available for purchase through the store (look for "personal" face shields).
    • A few face shields are also available inside the lab (racks in 1440E and 1480C for the cleanroom, supply rack in ROBIN) for in-person sessions. These are the same type as the face shields used at wet benches (but the face shields from the wet benches should NOT be used for training sessions outside of the benches).
    • Lightweight face shields have been found to be more comfortable than the type used at wet benches, and are recommended especially for long sessions or when multiple sessions are expected (such as for new LNF users)
  5. The two lab users are expected to maintain a 6 ft distance between themselves as much as possible, although it is understood that there will be times during the practice session that the users will have to be closer than 6 ft.
  6. As normal, both the tool and the lab location must both be reserved in the scheduler. The tool must be reserved by the lab user who is practicing, who should invite the experienced user.

New LNF access and occupancy protocols

EECS building access (updated 11/1/2020)

  • Access to LNF is limited to researchers who have been granted access to the building.
  • Building access is still very restricted. Building ingress and egress protocols (unless in the case of emergency evacuation) will follow specific U-M regulations, see http://ehs.umich.edu/wp-content/uploads/2020/05/COVID-19-Daily-Screening-Protocol-Research.pdf and future communications from the University and/or College of Engineering.
    • Building entry is still only done using your MCard.
    • Face masks (homemade face coverings are acceptable) are required to enter the building per State/U-M.
    • Starting 8/10/2020, there are no more screening stations, but you still have to complete the form at https://responsiBLUE.umich.edu/ and be prepared to show the resulting green check mark if asked during your time onsite.}} Some units also require a screenshot to be emailed to a specific address.
    • You may exit the building from any convenient door and no longer need to card out
  • The buidling is open for non-LNF research activities 7am-11:30pm Mon-Sat (No Sunday usage) in two distinct shifts: 7am-3pm and 3:30pm-11:30pm.
  • Starting Monday 8/31/2020, you may also enter the LNF outside of your shift times. However, please make sure to avoid any interactions with researchers from other cohorts outside of the LNF (corridors, atrium, parking lot...), and we strongly recommend that you still try to focus your onsite presence around your original shift times whenever possible. Start earlier, finish later when needed, but if you can avoid coming in the middle of the other shift, it would be best. Also, your LNF access device will still not work on Sundays.
  • The recommended location for eating or drinking locations are the tables in Pierpont Commons. When this is not possible, eating/drinking in the atrium tables is an authorized alternative.
  • In case of emergency, lab evacuations and emergency protocols are unchanged but all personnel should keep their face mask on and practice as much social distancing as possible during evacuation.

LNF access


There is now a minimum of 2 minutes between successive lab entrances in both cleanroom and ROBIN. However, we are allowing up to 2 people in the cleanroom gowning area, as long as they maintain 6 ft distancing. See more details below. Remember: if the reader light turns green when you present your card, access has been correctly granted. If it is red, do not proceed. If the door alarm rings, it means that there was an issue. Please contact staff.
The ROBIN bio room will remain closed (less than 144sq.ft.) for the time being.
The CAD room is now on the scheduler and will only be used by one person at a time.

Lab occupancy restrictions

Maximum occupancy of one person per defined location (listed below) regardless of the number of pieces of equipment that may be available. These locations are visually defined in the lab by using "caution" tape placed at about 7ft high when the location is not defined by a door. Maps are posted in each location. Lab occupancy is now a “tool” reservable in the LNF online services scheduler, with one such reservation per each of the locations below. You should reserve your location(s) in the lab before reserving the tool to eliminate the risk of the space already being reserved even though the tool you need is available. You should only reserve the location for the time that you will be present in that space. If the equipment runs unattended per the normal SOP, the location does not need to be reserved while you are away.
Lab occupancy reservation is only needed if you are staying in the space. If you will be in a location more than approximately 5 minutes, you need to reserve that location. If you are only passing through, retrieving labware from a rack or items from a drybox, you do not need to reserve the space, but follow the "Passing people" procedure below and please complete what you need to do promptly while maintaining social distancing.

Lab area general maps: See below for maps of general areas in the cleanroom and ROBIN. Effective Wednesday 9/2/2020, these areas will be further divided per the tables listed below. Note that 6 ft distancing between work stations is still required at all times.

Note that the 1440S area is becoming a transit space: no reservation is required but 6 ft distancing should be maintained at all times.

Locations as of 9/2/20 Equipment
1448 east NanoSpec 6100, Woollam M-2000 Ellipsometer
1448 west Zygo NewView 5000, Dektak XT Surface Profilometer, Flexus 2320-S
1440A north Deep UV SenLights PL16, Solvent Bench 84, 1440A, Solvent Bench 83, 1440A
1440A south RCA Clean Bench 81, 1440A, Acid Bench 80, 1440A
1440B north Xactix XeF2, Glove Box, Tousimis Automegasamdri 915B (CPD)-1
1440B south Stack 6, Angstrom Engineering, Acid Bench 72, Acid Bench 73,
1440C north CEE 100CB Spinner, Base Bench 63,
1440C south CEE Developer #1, CEE Developer #2, CEE 200X PR Spinner #1, CEE 200X PR Spinner #2, Gold Plating Station
1440D north EnerJet Evaporator, Cooke Evaporator
1440D AE AE Evaporator
1440D south JetFirst-150 RTP, JetFirst-100 Forming, SJ-20 Evaporator, SJ-26 Evaporator
1440E north Oxford ALD, Veeco Fiji ALD
1440E south LAM 9400, Plasmatherm 790, Oxford ICP RIE, GSI PECVD
1450 east GCA AS200 AutoStep, ACS 200 cluster tool, Image Reversal Oven, IR Microscope
1450 NW MA/BA-6 Mask/Bond Aligner, MA6 Mask Aligner, SB-6E Bonder, CL200 Megasonic Cleaner, nP12 nanoPREP
1450 SW EVG620 Bond Aligner, EVG 510, EVG 520IS
1450 central MJB3-#2, Heidelberg Mask Maker
1480A central SEM In-line, EDS
1480A north YES Plasma Stripper, E-Beam Spinner/Hot-Plate Bench 21, E-Beam Solvent Bench 22
1480A south JEOL E-Beam
1480B NE STS Pegasus 4, STS Pegasus 6, STS Glass Etcher
1480B NW PDS 2035
1480B SE P5000 RIE
1480B SW Solvent Bench 14, Acid Bench 12, Mask Bench 13
1480C NE Nanoquest II Ion Mill, P5000 PECVD, Furnace Stack 1, Endeavor M1 AlN Sputter
1480C Lab18_01 Lab18_01
1480C Central Lab18_02, PVD75
1480C SE Furnace Stack 2, Furnace Stack 3, Furnace Stack 4, Furnace Stack 5
1480C SW PFC Bench 01, Acid Bench 02
1332 east Wire Bonder, Lapper
1332 west NanoSpec 6100, ADT 7100 Dicing Saw, CMP Strasbaugh 6EC, SSEC Wafer Cleaner
1436A BSL-2 Room
1436C Base Bench 91
1436D Acid Bench 92, EDP Bench 93, Rame-Hart Goniometer
1436F Convection Oven, Dimatix InkJet, Solvent Bench 94
1436G north MJB 45S, NanoInk DPN 5000, Dektak 6M Surface Profilometer
1436G SE Agilent uFTIR, Olympus LEXT Interferometer
1436G SW Flip Chip Bonder, YES Vacuum Oven, Olympus BX-51 Microscope, Glen 1000P Plasma Cleaner

Passing people

When passing people in corridors or connecting spaces, please use the following protocol:

  • Alert the other user that you wish to pass/enter so that they can move when possible
  • Keep a minimum 6 ft distance if possible and turn away from each other

Room access and gowning protocols


  • Protocol updates
    • Access control system enforces 2 min delay between successive entries
    • Minimize time spent in gowning room
    • Soap provided at sink in gowning room
    • Practice of shared garment bags has ended so that bags are no longer passed on from one user to the next.
      • All users are issued 2 name tags so that garment bags are not used while the user is in the cleanroom.
      • Bags are pulled at the same time as suits (Thursday mornings).
      • Hangers are left “empty” by default. users should take clean glasses from rack, and store them in their garment bag to reuse during the week.
      • Clean bags are stored in gowning room
    • No sharing safety glasses: safety glasses will be cleaned weekly.
  • Specific steps at entry
    • If you see that someone has just carded in, wait 2 minutes. If there are two users in the gowning room, wait until one of them leaves the gowning room before carding in. If there are fewer than 2 people, present your access device: if the card reader light turns green, the door will open. Enter the gowning area.
    • 1) remove personal face mask and store in small ziploc bag if desired (to be placed in white hanging garment bag) 2) wash hands w soap and water, 3) put first pair of gloves, 4) don LNF face mask
    • Select a new garment bag if first entry in the week (following Thursday morning lab clean), attach second name tag on bag and place ziploc bag with personal face mask inside
    • Select appropriate garments and clean safety glasses at first entry in the week (following Thursday morning lab clean) and proceed with the rest of gowning steps
    • Put second pair of gloves on when entering the cleanroom
  • Specific steps at exit
    • Do not enter the gowning room if there are already two users inside.
    • Degown, place garments in white hanging bag, including safety glasses (put in front pocket or on hanger. Do not place back on rack)
    • Retrieve personal face mask from white hanging garment bag
    • Exit gowning room, do not reuse booties, place in trash can after exiting
    • Throw away LNF face mask, wash hands and don personal face mask


  • Gowning protocol updates
    • Access control system enforces 2min delay between successive entries
    • Minimize time spent in gowning area
    • Added hand sanitizer dispenser at ROBIN entrance if/when available
    • Added wipes at entrance to ROBIN corridor (by booties container)
    • No sharing safety glasses: safety glasses will be cleaned at least weekly (daily being considered), users should take clean glasses from the rack, and store them in their niche area to reuse during the week.
    • No sharing niche areas and space only used for single lab coat, niches to be wiped down everytime they are emptied for laundry
    • All users will be issued two name tags so that niches are not used while working in the lab.
  • Specific steps at entry
    • If you see that someone has just carded in, wait 2 minutes. If there is a user in the gowning area, wait until they leave the gowning area. If you don't see anyone, present your card to see if the light turns green. If it is green, enter the lab.
    • Wipes are available at entrance to ROBIN corridor (by booties container)
    • Face masks are mandatory
    • Any user entering ROBIN first needs to 1) remove personal face mask and store in small ziploc bag if desired (to be placed in niche area) 2) use hand sanitizer if available/or wash hand in sink, 3) put first pair of gloves, 4) don LNF face mask and 5) proceed with the rest of gowning steps including second pair of gloves.
    • Wipe safety glasses every time (with same wipes we used before)
    • Put second pair of gloves on before going to process
  • Specific steps at exit
    • Do not stand in the gowning area if it is already occupied. Wait until the person gowning up has moved on to process
    • Degown, place garments in niche area, including safety glasses. Do not place safety glasses back on rack. Retrieve personal face mask from niche area
    • Exit ROBIN, place booties (and first pair of gloves?) in trash can when exiting
    • Wash hands, throw away LNF face mask and don personal face mask

CAD room

  • The CAD room can now only be used by one person at a time. The room should be scheduled (scheduler > LNF Offices > Offices > CAD room) - a direct link will be posted on the door.
  • Wipes are available in the room. When entering, please wipe down the area where you will work (table top, keyboard, mouse, armrest). Please do the same before leaving.

New lab usage protocols

Lab occupancy reservation

Physical presence inside the lab requires corresponding reservations on one of the “physical locations” tools in the cleanroom and ROBIN.

Staggered usage of evaporators in EECS 1440D

Evaporators in 1440D are now scheduled in two hour blocks with fixed schedules to maximize availability while addressing distancing needs. In 1440D north, the Enerjet evaporator is scheduled at even hours, 8am, 10am, noon etc. The Cooke evaporator is scheduled at odd hours, 9am, 11am, 1pm, etc. In 1440D south, the AE evaporator is scheduled at even hours, 8am, 10am, noon etc. The SJ-20 evaporator is scheduled at odd hours, 9am, 11am, 1pm, etc.

Users should be ready and load the tool in the first 15-minutes of the hour, pump it and leave the space to allow another user to load or run the other tool in the area. Then you should only operate the deposition after an hour and 10 minutes or more of pumping and be completely unloaded before your 2-hour reservation is completed. (eg. 1440D North: Enerjet Load 8-8:15. Cooke Load 9-9:15. Enerjet Run 9:25-9:55, Enerjet Next User Load 10-10:15, Cooke Run 10:25-11, etc.)

Reduced number of schedulable hours on key/bottleneck equipment

Maximum schedulable hours have been reduced on tools that are potential bottlenecks.

Additional recommendations

  • When passing people, alert them that you wish to come through, keep a minimum 6ft distance if possible and turn away from each other. Communicate between each other as needed.
  • Avoid peak usage times (weekday afternoons) - or be prepared for possible long waiting time at gowning room
  • Please make all lab occupancy/location and equipment reservations at least 4 hours in advance
  • The 10% equipment booking fee is being suspended during this transition phase to further encourage advance planning.


All researchers are expected to self-monitor adherence to U-M guidelines and compliance with the safety and hygiene plan described here. This is especially critical during this first pilot phase as compliance will drive the schedule and protocols to be used in subsequent phases. LNF staff will actively monitor and enforce U-M guidelines and the safety and hygiene plan described here. Any observed deviation may lead to lab access suspension.

LNF users and staff can - and should - report any lab safety issues, including personnel who are ill or not following safety protocols, via the LNF online feedback system, directly to the managing director or faculty director. Concerns can also be reported via the U-M compliance hotline website (https://compliance.umich.edu), by calling 866-990-0111 or contacting EHS at 734-647-1143 or EHS-Covid-19-Reporting@umich.edu