Confocal laser optical profilometry

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Confocal laser optical profilometry
LEXT confocal.jpg
Technology Details
Technology Metrology
Equipment Olympus OLS 4000 LEXT
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Confocal laser optical profilometry is an optical 3D surface profiling technology.

Method of operation

  • This technique is based on confocal microscope configuration using high numerical aperture objectives which have a very narrow depth of focus.
  • A laser is scanned in X/Y across field of view on the sample surface.
  • Reflected intensity data is collected as focus (Z) is scanned with the peak intensity corresponding to feature height.


Applications

How is this technology used in nanofabrication and what types of devices/research areas is it useful in?


Equipment

Olympus OLS 4000 LEXT

Main article: Olympus OLS 4000 LEXT


See also

References


Further reading