Confocal laser optical profilometry
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|Confocal laser optical profilometry|
|Equipment||Olympus OLS 4000 LEXT|
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Confocal laser optical profilometry is an optical 3D surface profiling technology.
Method of operation
- This technique is based on confocal microscope configuration using high numerical aperture objectives which have a very narrow depth of focus.
- A laser is scanned in X/Y across field of view on the sample surface.
- Reflected intensity data is collected as focus (Z) is scanned with the peak intensity corresponding to feature height.
How is this technology used in nanofabrication and what types of devices/research areas is it useful in?
Olympus OLS 4000 LEXT
Main article: Olympus OLS 4000 LEXT