Confocal laser optical profilometry

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Confocal laser optical profilometry
LEXT confocal.jpg
Technology Details
Technology Metrology
Equipment Olympus OLS 4000 LEXT
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Confocal laser optical profilometry is an optical 3D surface profiling technology.

Method of operation

  • This technique is based on confocal microscope configuration using high numerical aperture objectives which have a very narrow depth of focus.
  • A laser is scanned in X/Y across field of view on the sample surface.
  • Reflected intensity data is collected as focus (Z) is scanned with the peak intensity corresponding to feature height.


How is this technology used in nanofabrication and what types of devices/research areas is it useful in?


Olympus OLS 4000 LEXT

Main article: Olympus OLS 4000 LEXT

See also


Further reading