Difference between revisions of "EVG 510"

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(Created page with "Figure out actual tool name and redirect")
 
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Figure out actual tool name and redirect
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<!-- Set the resource ID, 5 digit # found on the scheduler -->
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{{#vardefine:toolid|140031}}
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<!-- Set the Process Technology (see subcategories on Equipment page) -->
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{{#vardefine:technology|Wafer Bonding}}
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{{#vardefine:restriction|3}}
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{{infobox equipment
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|caption =
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|materials = Si, Glass
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|mask =
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|size = 100 mm, 150 mm
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|chemicals =
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|gases =
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|overview = [[{{PAGENAME}}#System_Overview | System Overview]]
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|sop = [https://link.to.google.doc/preview SOP]
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|processes = [[{{PAGENAME}}/Processes|Supported Processes]]
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|userprocesses = [[LNF_User:{{PAGENAME}}_User_Processes|User Processes]]
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|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
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}}
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{{warning|This page has not been released yet.}}
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<!-- Insert the tool description here -->
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==Announcements==
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*Update this with announcements as necessary
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==Capabilities==
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<!--A more general description of what the tool is capable of doing.-->
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* Etch Rate
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* Resolution
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* Aspect Ratio
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* Thickness range
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==System Overview==
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===Hardware Details===
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* Gases
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* Pressure
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* Chuck
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* Chamber
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* RF / Power Specs
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* Chemicals
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===Substrate Requirements===
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* Wafer Size
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* Wafer type
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* Any mounting?
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* Wafer thickness
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===Material Restrictions===
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{{material restrictions}}
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==Supported Processes==
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<!-- We recommend creating a subpage detailing the supported processes for the tool, which will be generated if you leave the link below. Alternatively, you may include the information on this page. In that case, the Supported Processes document from the equipment manual can be included here, using {{#widget:GoogleDoc|key=googledocid}} -->
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There are several processes for this tool supported by the LNF, which are described in more detail on the [[/Processes/]] page.
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<!-- If you allow custom recipes, let users know to contact a tool engineer, and you may also create the link below which will create a page that users can add custom recipes to. -->
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In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} User Processes]]. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.
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==Standard Operating Procedure==
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<!-- To include a document from google docs, use the line below, replace "googledocid" with the ID for the document. Remember, to make this visible, you must set Sharing for the document to "Anyone with the link can view". -->
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{{#widget:GoogleDoc|key=googledocid}}
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==Checkout Procedure==
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<!-- Describe the checkout procedure for the tool. For example: -->
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# Read through this page and the Standard Operating Procedure above.
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# Complete the training request form [http://examplelink.com here].
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# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training.
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# A tool engineer will schedule a time for initial training.
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# Practice with your mentor or another authorized user until you are comfortable with tool operation.
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# Complete the SOP quiz [http://examplelink.com here].
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# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
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==Maintenance==
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<!-- Describe standard maintenance/qualification tests here -->
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===Process Name===
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<!-- This is an example a chart published with etch data. You can just replace the url with your own. -->
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{{#widget:Iframe
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|url=chart url
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|width=800
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|height=400
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|border=0
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}}

Revision as of 13:17, 7 July 2015



EVG 510
140031.jpg
Equipment Details
Technology Wafer Bonding
Materials Restriction Metals
Material Processed Si, Glass
Sample Size 100 mm, 150 mm
Equipment Manual
Overview System Overview
Operating Procedure SOP
Supported Processes Supported Processes
User Processes User Processes
Maintenance Maintenance


Warning Warning: This page has not been released yet.


Announcements

  • Update this with announcements as necessary

Capabilities

  • Etch Rate
  • Resolution
  • Aspect Ratio
  • Thickness range

System Overview

Hardware Details

  • Gases
  • Pressure
  • Chuck
  • Chamber
  • RF / Power Specs
  • Chemicals

Substrate Requirements

  • Wafer Size
  • Wafer type
  • Any mounting?
  • Wafer thickness

Material Restrictions

The EVG 510 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.


Supported Processes

There are several processes for this tool supported by the LNF, which are described in more detail on the Processes page.

In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on EVG 510 User Processes. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.

Standard Operating Procedure

Widget text will go here.

Checkout Procedure

  1. Read through this page and the Standard Operating Procedure above.
  2. Complete the training request form here.
  3. Create a Helpdesk Ticket requesting training.
  4. A tool engineer will schedule a time for initial training.
  5. Practice with your mentor or another authorized user until you are comfortable with tool operation.
  6. Complete the SOP quiz here.
  7. Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.

Maintenance

Process Name