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Elliptically polarized light reflects from the measurement sample and is analyzed in p- and s- vector components. p- polarized light is in the plane of incidence and s- polarized light is perpendicular to that plane. The change in polarization is measured as Delta and Psi. Delta is the phase shift between the two vector components of the elliptically polarized light. Tan(Psi) is the amplitude attenuation ratio of the two components. A model is fit to this data to extract film parameters.


https://en.wikipedia.org/wiki/Ellipsometry http://www.jawoollam.com/faq.html