Difference between revisions of "Everbeing BD-6 Probe Station"
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| − | The [[{{PAGENAME}}]] is a probe | + | The [[{{PAGENAME}}]] is a system that allows for electrical testing of structures using high precision micro manipulators to bring probes into contact with structures or probe pads on your sample. There is a digital multimeter for use at the tool to measure resistance between the probes that are in contact with your sample. |
==Announcements== | ==Announcements== | ||
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==Capabilities== | ==Capabilities== | ||
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==System overview== | ==System overview== | ||
===Hardware details=== | ===Hardware details=== | ||
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===Substrate requirements=== | ===Substrate requirements=== | ||
| − | * | + | * The vacuum stage is capable of holding small pieces, 4", and 6" wafers. |
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===Material restrictions=== | ===Material restrictions=== | ||
{{material restrictions}} | {{material restrictions}} | ||
| − | ==Supported processes== | + | There are no material restrictions for this tool. |
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<!-- We recommend creating a subpage detailing the supported processes for the tool, which will be generated if you leave the link below. Alternatively, you may include the information on this page. In that case, the Supported Processes document from the equipment manual can be included here, using {{#widget:GoogleDoc|key=googledocid}} --> | <!-- We recommend creating a subpage detailing the supported processes for the tool, which will be generated if you leave the link below. Alternatively, you may include the information on this page. In that case, the Supported Processes document from the equipment manual can be included here, using {{#widget:GoogleDoc|key=googledocid}} --> | ||
| − | There are several processes for this tool supported by the LNF, which are described in more detail on the [[/Processes/]] page. | + | <!-- There are several processes for this tool supported by the LNF, which are described in more detail on the [[/Processes/]] page. --> |
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| − | In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} user processes]]. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system. | + | <!-- In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} user processes]]. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system. --> |
==Standard operating procedure== | ==Standard operating procedure== | ||
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# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training. | # Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training. | ||
| − | # A tool engineer will | + | # A tool engineer will arrange a time with you to meet for training. Checkout to receive authorization to use the tool independently may require more than one training session. |
| − | # Practice with your mentor or another authorized user until you are comfortable with tool operation. | + | <!-- # Practice with your mentor or another authorized user until you are comfortable with tool operation. --> |
| − | # Complete the SOP quiz [http://examplelink.com here]. | + | <!-- # Complete the SOP quiz [http://examplelink.com here]. --> |
| − | # Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool. | + | <!-- # Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool. --> |
| − | ==Maintenance== | + | <!-- ==Maintenance== |
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| − | ===Process name=== | + | <!-- ===Process name=== --> |
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Latest revision as of 15:56, 8 June 2021
| Everbeing BD-6 Probe Station | |
|---|---|
 | |
| Equipment Details | |
| Technology | Metrology |
| Materials Restriction | General |
| Sample Size | pieces up to 6" wafers |
| Equipment Manual | |
| Overview | System Overview |
| Operating Procedure | SOP |
| Supported Processes | Supported Processes |
| User Processes | User Processes |
| Maintenance | Maintenance |
The Everbeing BD-6 Probe Station is a system that allows for electrical testing of structures using high precision micro manipulators to bring probes into contact with structures or probe pads on your sample. There is a digital multimeter for use at the tool to measure resistance between the probes that are in contact with your sample.
Contents
Announcements
- Update this with announcements as necessary
Capabilities
System overview
Hardware details
Substrate requirements
- The vacuum stage is capable of holding small pieces, 4", and 6" wafers.
Material restrictions
The Everbeing BD-6 Probe Station is designated as a General class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.
Approved materials
There are no material restrictions for this tool.
Standard operating procedure
Widget text will go here.
Checkout procedure
- Read through this page and the Standard Operating Procedure above.
- Create a Helpdesk Ticket requesting training.
- A tool engineer will arrange a time with you to meet for training. Checkout to receive authorization to use the tool independently may require more than one training session.
