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Difference between revisions of "Everbeing BD-6 Probe Station"

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{{infobox equipment
 
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|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
 
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
 
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{{warning|This page has not been released yet.}}
 
  
 
<!-- Insert the tool description here -->
 
<!-- Insert the tool description here -->
The [[{{PAGENAME}}]] is a probe station.
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The [[{{PAGENAME}}]] is a system that allows for electrical testing of structures using high precision micro manipulators to bring probes into contact with structures or probe pads on your sample.  There is a digital multimeter for use at the tool to measure resistance between the probes that are in contact with your sample.
  
 
==Announcements==
 
==Announcements==
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==Capabilities==
 
==Capabilities==
 
<!--A more general description of what the tool is capable of doing.-->
 
<!--A more general description of what the tool is capable of doing.-->
* Etch Rate
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*
* Resolution
 
* Aspect Ratio
 
* Thickness range
 
  
 
==System overview==
 
==System overview==
 
===Hardware details===
 
===Hardware details===
* Gases
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*  
* Pressure
 
* Chuck
 
* Chamber
 
* RF / Power Specs
 
* Chemicals
 
  
 
===Substrate requirements===
 
===Substrate requirements===
* Wafer Size
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* The vacuum stage is capable of holding small pieces, 4", and 6" wafers.
* Wafer type
 
* Any mounting?
 
* Wafer thickness
 
  
 
===Material restrictions===
 
===Material restrictions===
 
{{material restrictions}}
 
{{material restrictions}}
  
==Supported processes==  
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There are no material restrictions for this tool.
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<!-- We recommend creating a subpage detailing the supported processes for the tool, which will be generated if you leave the link below. Alternatively, you may include the information on this page. In that case, the Supported Processes document from the equipment manual can be included here, using {{#widget:GoogleDoc|key=googledocid}} -->
 
<!-- We recommend creating a subpage detailing the supported processes for the tool, which will be generated if you leave the link below. Alternatively, you may include the information on this page. In that case, the Supported Processes document from the equipment manual can be included here, using {{#widget:GoogleDoc|key=googledocid}} -->
  
There are several processes for this tool supported by the LNF, which are described in more detail on the [[/Processes/]] page.
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<!-- There are several processes for this tool supported by the LNF, which are described in more detail on the [[/Processes/]] page. -->
  
 
<!-- If you allow custom recipes, let users know to contact a tool engineer, and you may also create the link below which will create a page that users can add custom recipes to. -->
 
<!-- If you allow custom recipes, let users know to contact a tool engineer, and you may also create the link below which will create a page that users can add custom recipes to. -->
In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} user processes]]. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.
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<!-- In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} user processes]]. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system. -->
  
 
==Standard operating procedure==
 
==Standard operating procedure==
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# Read through this page and the Standard Operating Procedure above.
# Complete the training request form [http://examplelink.com here].
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<!-- # Complete the training request form [http://examplelink.com here]. -->
 
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training.
 
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training.
# A tool engineer will schedule a time for initial training.
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# A tool engineer will arrange a time with you to meet for training.  Checkout to receive authorization to use the tool independently may require more than one training session.
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
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# Complete the SOP quiz [http://examplelink.com here].
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<!-- # Complete the SOP quiz [http://examplelink.com here]. -->
# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
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<!-- # Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool. -->
  
==Maintenance==  
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<!-- Describe standard maintenance/qualification tests here -->
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Describe standard maintenance/qualification tests here -->
  
===Process name===
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<!-- ===Process name=== -->
 
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|url=chart url
 
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Latest revision as of 15:56, 8 June 2021

The Everbeing BD-6 Probe Station is a system that allows for electrical testing of structures using high precision micro manipulators to bring probes into contact with structures or probe pads on your sample. There is a digital multimeter for use at the tool to measure resistance between the probes that are in contact with your sample.

Everbeing BD-6 Probe Station
90011.jpg
Equipment Details
Technology Metrology
Materials Restriction General
Sample Size pieces up to 6" wafers
Equipment Manual
Overview System Overview
Operating Procedure SOP
Supported Processes Supported Processes
User Processes User Processes
Maintenance Maintenance


Contents

Announcements

  • Update this with announcements as necessary

Capabilities

System overview

Hardware details

Substrate requirements

  • The vacuum stage is capable of holding small pieces, 4", and 6" wafers.

Material restrictions

The Everbeing BD-6 Probe Station is designated as a General class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.


There are no material restrictions for this tool.



Standard operating procedure

Widget text will go here.

Checkout procedure

  1. Read through this page and the Standard Operating Procedure above.
  2. Create a Helpdesk Ticket requesting training.
  3. A tool engineer will arrange a time with you to meet for training. Checkout to receive authorization to use the tool independently may require more than one training session.