File:1000nm gratings low reflection.jpg

From LNF Wiki
Revision as of 20:37, 11 September 2019 by Wrightsh (talk | contribs) (Stepper exposure matrix failed 1000nm gratings (50/50 duty cycle) in 0.97µm of SPR 955. Substrate is Si, 5nm SiO2, 34nm Si3N4, 5nm SiO2 and should have ~10% reflection at 365nm (couldn't measure this directly). 100C 90 sec softbake, 110C 90 sec PEB, A...)
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to navigation Jump to search

Original file(3,402 × 852 pixels, file size: 220 KB, MIME type: image/jpeg)

Stepper exposure matrix failed 1000nm gratings (50/50 duty cycle) in 0.97µm of SPR 955. Substrate is Si, 5nm SiO2, 34nm Si3N4, 5nm SiO2 and should have ~10% reflection at 365nm (couldn't measure this directly). 100C 90 sec softbake, 110C 90 sec PEB, AZ 300 25sec ACS dev.

File history

Click on a date/time to view the file as it appeared at that time.

Date/TimeThumbnailDimensionsUserComment
current11:57, 12 September 2019Thumbnail for version as of 11:57, 12 September 20193,402 × 852 (220 KB)Wrightsh (talk | contribs)Stepper exposure matrix 1000nm gratings (50/50 duty cycle) in 0.97µm of SPR 955. Substrate is Si, 5nm SiO2, 34nm Si3N4, 5nm SiO2 and should have ~10% reflection at 365nm (couldn't measure this directly). 100C 90 sec softbake, 110C 90 sec PEB, AZ 300 2...
  • You cannot overwrite this file.

The following page uses this file:

Metadata