Difference between revisions of "File:SPR 955 0.97µm CD Loss vs Exposure.png"

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SPR 955 on Si, exposed in stepper, developed in ACS.  softbake: 100C 90 sec , PEB; 110C 90sec

Latest revision as of 12:29, 2 May 2018

SPR 955 on Si, exposed in stepper, developed in ACS. softbake: 100C 90 sec , PEB; 110C 90sec

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current12:27, 2 May 2018Thumbnail for version as of 12:27, 2 May 20181,594 × 948 (156 KB)Wrightsh (talk | contribs)
12:21, 2 May 2018Thumbnail for version as of 12:21, 2 May 20181,182 × 720 (109 KB)Wrightsh (talk | contribs)
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