Revision history of "File:Stepper 500nm Grating SPR 955 0.97µm CD Loss vs Defocus.png"

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  • curprev 11:36, 3 May 2018Wrightsh talk contribs 124 bytes +124 This shows the CD loss of a 500nm grating in the stepper in SPR 955 0.97µm. Much beyond 1µm and the pattern wont resolve.