File:Stepper 500nm Grating SPR 955 0.97µm CD Loss vs Defocus.png

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Revision as of 11:36, 3 May 2018 by Wrightsh (talk | contribs) (This shows the CD loss of a 500nm grating in the stepper in SPR 955 0.97µm. Much beyond 1µm and the pattern wont resolve.)
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This shows the CD loss of a 500nm grating in the stepper in SPR 955 0.97µm. Much beyond 1µm and the pattern wont resolve.

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current11:36, 3 May 2018Thumbnail for version as of 11:36, 3 May 20181,582 × 958 (145 KB)Wrightsh (talk | contribs)This shows the CD loss of a 500nm grating in the stepper in SPR 955 0.97µm. Much beyond 1µm and the pattern wont resolve.
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