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Description

This page includes links to financial announcements and memos related to the Lurie Nanofabrication Facility. Please see Internal billing procedure for the steps and details of the LNF internal billing process.

Fiscal Year 2023

Fee schedules effective January 1 2023:

Key updates are:

  • Room rates (daily and entry fees) have not changed.
  • Most tool rates have increased by about 3%, i.e. for academic rates +$1/hr or +$2/hr above their previous value.
  • Due to higher maintenance/consumable costs on a few tools, their rates have gone up by more than 3%. None of these increases exceed +$3/hr above their prior academic rate.
  • The JEOL e-beam lithography tool rate has not changed.
  • The usage and billing structure for PDMS processing has changed: PDMS kits are no longer shared among the user community: they should be purchased by users, and the Solvent 94 bench rate has decreased accordingly.
  • Note that costs for store items are updated regularly to adjust to market conditions.

Fiscal Year 2022

No change. internal (charged to U-M shortcode), U.S. academic and government, and non-academic and foreign rates. Precious metal rates are included in fee schedules (files listed above). (April 2021)

Fiscal Year 2021

Annual fee update: no significant change except for realignment of tool rates for the Glass etcher and LAM 9400 RIE tools. internal (charged to U-M shortcode), U.S. academic, and non-academic and foreign rates. Precious metal rates are included in fee schedules (files listed above). (April 2021)

Fiscal Year 2020

Pt deposition process by ALD is released: Material surcharge included in files linked below. (June 2019)


Archived Memos