Financial Memos
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Contents
Description
This page includes links to financial announcements and memos related to the Lurie Nanofabrication Facility. Please see Internal billing procedure for the steps and details of the LNF internal billing process.
Fiscal Year 2022
- No change. internal (charged to U-M shortcode), U.S. academic, and non-academic and foreign rates. Precious metal rates are included in fee schedules (files listed above). (April 2021)
Fiscal Year 2021
- Annual fee update: no significant change except for realignment of tool rates for the Glass etcher and LAM 9400 RIE tools. internal (charged to U-M shortcode), U.S. academic, and non-academic and foreign rates. Precious metal rates are included in fee schedules (files listed above). (April 2021)
Fiscal Year 2020
- Pt deposition process by ALD is released: Material surcharge included in files linked below. (June 2019)
Fiscal Year 2019
- Annual fee update: internal (charged to U-M shortcode), external U.S. academic, and non-academic and foreign rates. Precious metal rates are now included in fee schedules (files listed above). (January 2019)
Fiscal Year 2018
- Annual fee update: internal (charged to U-M shortcode), external U.S. academic or government, and non-academic and foreign rates. Precious metal rates for internal, external U.S. academic, and for non-academic users. (March 2018)
Fiscal Year 2017
- Annual fee update: internal (charged to U-M shortcode), external U.S. academic, and non-academic and foreign rates. Precious metal rates for internal, external U.S. academic, and for non-academic users. (October 2016)
