Financial Memos
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Contents
Description
This page includes links to financial announcements and memos related to the Lurie Nanofabrication Facility. Please see Internal billing procedure for the steps and details of the LNF internal billing process.
2026
Updated fee schedules, effective January 1, 2026.
- internal (charged to U-M shortcode),
- U.S. academic and government, and
- non-academic and foreign rates.
The key updates were:
- Room rates did not change
- Most tool rates increased by approximately 2-3% for internal rates (about 2-3% for external non-academic rates and 6% for external academic rates due to required update of the Indirect Cost rate)
- Due to higher maintenance and consumable costs on the dicing saw and wafer bonding equipment, their rates increased by more than 3%, but no more than an internal rate increase of +$3/hr.
- Store items, precious metals, and the staff hourly rate have been updated to adjust to market conditions. Please note in particular that market costs of gold and iridium have increased significantly.
2025
Updated fee schedules, effective January 1, 2025.
- internal (charged to U-M shortcode),
- U.S. academic and government, and
- non-academic and foreign rates.
The key updates were:
- Room and tool rates increased by approximately 5% for internal rates (about 9% for external non-academic rates and 12% for external academic rates due to required updates of the Indirect Cost calculations)
- Due to higher maintenance and consumable costs on a few LPCVD furnace tubes, their rates went up by more than 5%, but by no more than an internal rate increase of +$6/hr.
- Store items, precious metals, and the staff hourly rate have been updated to adjust to market conditions.
2024
Updated fee schedules, effective January 1, 2024:
- internal (charged to U-M shortcode),
- U.S. academic and government, and
- non-academic and foreign rates.
The key updates were:
- Room rates (daily and entry fees) did not change
- Most tool rates increased by approximately 3%, resulting in an academic rate of increase of +$1-2/hr
- Due to higher maintenance and consumable costs on a few LPCVD furnace tubes, their rates went up by more than 3%, but no more than an academic rate increase of +$5/hr.
- The JEOL e-beam lithography tool rate did not change
- The P5000 PECVD tool rate has been re-evaluated and its academic rate decreased by $5/hr
- Store items, precious metals, and the staff hourly rate have been updated to adjust to market conditions.
