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Description

This page includes links to financial announcements and memos related to the Lurie Nanofabrication Facility. Please see Internal billing procedure for the steps and details of the LNF internal billing process.

Fiscal Year 2024

Updated fee schedules, effective January 1, 2024:

The key proposed updates are:

  • Room rates (daily and entry fees) will not change
  • Most tool rates will increase by approximately 3%, resulting in an academic rate of increase of +$1-2/hr
  • Due to higher maintenance and consumable costs on a few LPCVD furnace tubes, their rates will go up by more than 3%, but no more than an academic rate increase of +$5/hr.
  • The JEOL e-beam lithography tool rate will not change
  • The P5000 PECVD tool rate has been re-evaluated and its academic rate will decrease by $5/hr
  • Store items, precious metals, and the staff hourly rate have been updated to adjust to market conditions.

Fiscal Year 2023

Fee schedules were updated in January 2023 for internal users (charged to U-M shortcode), U.S. academic and government users, and non-academic and foreign users. Key updates were:

  • Room rates (daily and entry fees) did not change.
  • Most tool rates increased by about 3%, i.e. for academic rates +$1/hr or +$2/hr above their previous value.
  • Due to higher maintenance/consumable costs on a few tools, their rates went up by more than 3%. None of these increases exceeded +$3/hr above their previous academic rate.
  • The JEOL e-beam lithography tool rate did not change.
  • The usage and billing structure for PDMS processing was updated: PDMS kits are no longer be shared among the user community: they are to be purchased by users, and the Solvent 94 bench rate decreased accordingly.
  • Note that costs for store items are updated regularly to adjust to market conditions.

Fiscal Year 2022

No change. internal (charged to U-M shortcode), U.S. academic and government, and non-academic and foreign rates. Precious metal rates are included in fee schedules (files listed above). (April 2021)

Fiscal Year 2021

Annual fee update: no significant change except for realignment of tool rates for the Glass etcher and LAM 9400 RIE tools. internal (charged to U-M shortcode), U.S. academic, and non-academic and foreign rates. Precious metal rates are included in fee schedules (files listed above). (April 2021)

Fiscal Year 2020

Pt deposition process by ALD is released: Material surcharge included in files linked below. (June 2019)


Archived Memos