Gold Etch GE-8111

Warning:

This page has not been released yet.

Gold Etchant GE-8111 is designed for etching thin gold films. It is a potassium iodide and iodine (K/I₂) chemistry. GE-8111 is compatible with both positive and negative resists. GE-8111 is designed to be used at room temperature in a well ventilated area. GE-8111 needs to be collected after use.

Contents

Processes

• Published Etch Rate 20Å/sec
• To minimize under cut use hard baked 1813

Process SOPs

• There are currently no process SOPs defined for this chemical.

Equipment

GE-8111 can be used in the following Wet Benches:

• Acid Bench 12 - large staff changed tank
• Acid Bench 73
• Acid Bench 82
• Acid Bench 92

Technical Data Sheet

Compatibility Chart

• Al - etch
• Al₂O₃ - slight
• Au - etch
• C - slight
• Co - Slight
• Cr - ok
• Cu - corrode
• Fe - ok
• GaAs - etch
• Mg - ok
• MgO - ok
• Nb - ok
• Ni - ok
• Pd - ok
• Pt - ok
• Ru - ok
• Si - ok
• Si₃N₄ - ~ 1Å/min
• SiO2 - ok
• Steel - ok
• Ta/TaN - ok
• Ti - ok
• W - ok
• ZnO - slight

Safety Data Sheet

• There are currently no Safety Data Sheets (SDSes) for this chemical.

References

• Other links that are useful