Difference between revisions of "Helium"

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==Equipment==
 
==Equipment==
 +
*[[GSI PECVD]]
 
*[[STS Glass Etcher]]
 
*[[STS Glass Etcher]]
 
*[[P5000 RIE]]
 
*[[P5000 RIE]]

Latest revision as of 11:30, 21 July 2015

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Helium is an inert gas that is generally used as a diluent in RIE applications to make the etch act as though it were running at a lower pressure. It is also used in electrostatic chucks to improve wafer cooling.

Equipment

Safety Data Sheet

References