Hydrogen bromide

From LNF Wiki
Revision as of 12:00, 2 October 2015 by Wrightsh (talk | contribs) (→‎Equipment)
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to navigation Jump to search
Warning Warning: This page has not been released yet.

HBr is a reactive gas that can be used for Si etching as well as XXXX. It is less reactive then Cl2 which can be helpful to achieve a slower etch rate.

Equipment

Safety Data Sheet

References