Infrared microscopy

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Infrared microscopy
Technology Details
Other Names Microscopy,  %other names and abbreviations, separated by commas%
Technology Metrology
Equipment List of Microscopy equipment
Materials %Optional materials processed%
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Infrared microscopy (Microscopy) is a method to look through a silicon wafer because silicon is transparent to infrared light.


Method of operation

Using infrared (IR) light and an IR detector, it is possible to see through a silicon wafer to see if patterns line up on the front and back of a wafer, allows wafer bonds to be checked, and determine if alignment has shifted during the bond aligning process. While the silicon is transparent, oxide is more absorptive thereby appearing darker, and metal will block the IR. With a

Parameters

Here we describe what parameters are of importance in this technology (e.g. power, temperature...). May not be relevant to some technologies.

Parameter 1

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You may want to make a separate sub-page or article specifically for a parameter if this is longer than, say a paragraph or two. If not, get rid of the {{main|xyz}} below the heading.

Subtechnology 1

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Describe any sub-technologies of this technology.

Applications

How is this technology used in nanofabrication and what types of devices/research areas is it useful in?

Materials

Optional description of materials that can be processed by technology. I think the best example of where this comes in handy would be with LPCVD describing the difference between HTO and LTO.

Equipment

If this is a "main category" for equipment (i.e. you categorized that equipment page to be this technology), you should list the equipment here with a brief description of that tool's capabilities. Seriously, though, just check out the RIE page.

Equipment 1

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Brief description of that piece of equipment.

Complete tool list


See also

Other related wiki pages

References


Further reading

  • Other stuff, e.g. technology workshop slides
  • External links (can be in another section below, if appropriate)