June 2016 water damage

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This page has been created to consolidate updates following the June 4th flood that occurred in EECS 1480 (new cleanroom space). Note that ROBIN and EECS 1440 (older part of the cleanroom) were not affected.

As of 6/4/16, all equipment in 1480 EECS is off-line and there is no user access to that area of the lab.

Facility status

No access to EECS 1480 (newer part of cleanroom)

Equipment status

Equipment Status Alternatives Comments
Furnaces stacks 1, 2, 3, 4 and 5 Off-line Alternatives available at Cornell. See below for more details and contact Pilar if you are interested.
P5000 PECVD Off-line Pneumatic Control Board has been replaced. Heat exchanger won't flow and will need to be addressed before tool can be evaluated further.
Lab 18-1 Off-line Create a ticket or email info@LNF.umich.edu with details of films/thicknesses
Lab 18-2 Off-line Create a ticket or email info@LNF.umich.edu with details of films/thicknesses Ti/Au, Cr/Au will be available in the Denton Explorer-14. Next target change will be on Wednesday 6/15, target in the tool: Ti/Au
AlN sputtering tool Off-line
PDS 2035 On-line Accessible starting June 15, 2016
AFM Off-line (MC)2 - see details below Significant tool damage
SEM On-line (MC)2 - see details below Expected to be back online the week of June 13, 2016
Pegasus 4 and 6 Off-line
STS glass etcher Off-line
P5000 RIE Off-line
JEOL e-beam lithography Off-line Expected to be back online the week of June 13, 2016
YES plasma stripper On-line Re-opens June 15, 2016
Pre furnace clean bench Off-line Working-needs cleaning and testing. Will come online shortly after 1480C opens.
Acid 02 bench Off-line Working-needs cleaning and testing. Will come online shortly after 1480C opens.
Acid 12 bench Off-line See alternative below Working-should be online when 1480B re-opens
Mask 13 bench Off-line See alternative below Working-should be online when 1480B re-opens
Solvent 14 bench Off-line See alternative below Working-should be online when 1480B re-opens
EB spinner 21 bench On-line See alternative below 1480A re-opens June 15, 2016
EB solvent 22 bench On-line 1480A re-opens June 15
Acid 23 bench Off-line

Alternative solutions and back up

Wafer mounting station

The wafer mounting station has been relocated near the LAM RIE tool

(MC)2 access for LNF users needing AFM/SEM

Furnace processing at Cornell University

  • Wet and dry Thermal Oxidation up to 1200 C
  • Ar, N2 and 5%H2 forming gas anneals 200-1100C
  • POCL3 Doping furnace for 4 and 6” wafers
  • Solid Planar Diffusion Sources of Boron and Phosphorus for 4” wafers only
  • LPCVD LTO 450 C Silane/O2
  • LPCVD Polysilicon, undoped, N+ or P+ in-situ Doped
  • LPCVD Silicon nitride — Stoichiometric, Low Stress, Hight Temp Oxide 800C

Wet benches (Acid 12, Mask 13, and Solvent 14)

Tanks were added in Acid 72 for:

  • Cr Etch
  • Gold Etch
  • Nanostrip
  • BHF

These should be used instead of Acid 12 and Mask 13.

Solvent 84 should be used instead of Solvent 14. This bench should accommodate most of the processing.


E-Beam Spinner/Hot-Plate Bench 21

Users can use the CEE 100CB spinner in 1440C to spin PMMA. 950K A2, 950K A4, and 950K A6 PMMA are available in amber bottles in the Akro bin near the top right corner of the bench.

Please create a helpdesk ticket if you don't have access to this spinner. If you are already checked out, please follow protocol particular to this bench.

You can also use the hotplates that are in 1440C for baking.

YES Plasma Stripper

A comparable O2 descum recipe has been developed on the Plasmatherm 790.

Ti/Au and Ti/Pt Sputtering Deposition

The Denton Explorer-14 Sputter has been equipped with both Au and Pt targets for sputtering using Ti as the bonding layer. Please write a ticket if you need training in this tool.