KMPR

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Is an i-line photoreists. It is epoxy based, high contrast, and can be developed in TMAH based developers. KMPR comes in a variety of viscosity and can coat 4-120um thicklayers in a single spin. KMPR 1010 and 1025 can be purchased through the LNF store in 50sccm syringes. They are delivered to the freezers in the user specified lab. KMPR 1010 can be used to create layers 10-20um thick, and KMPR 1025 can create layers 20-65um thick.

Processes

• There are currently no processes defined that use this chemical.

Process SOPs

• There are currently no process SOPs defined for this chemical.

Equipment

• CEE 100CB photoresist spinner
• Solitec Spinner

Technical Data Sheet

• Technical Data Sheet

Safety Data Sheet

• KMPR

References

• Other links that are useful

Glass Transition Temperature