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Is an i-line photoreists. It is epoxy based, high contrast, and can be developed in TMAH based developers. KMPR comes in a variety of viscosity and can coat 4-120um thicklayers in a single spin. KMPR 1010 and 1025 can be purchased through the LNF store in 50sccm syringes. They are delivered to the freezers in the user specified lab. KMPR 1010 can be used to create layers 10-20um thick, and KMPR 1025 can create layers 20-65um thick.
- There are currently no processes defined that use this chemical.
- There are currently no process SOPs defined for this chemical.
Technical Data Sheet
Safety Data Sheet
- Other links that are useful