LAM 9400

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Some at the top for what the tool is used for


Announcements

Any current announcements


System Overview

Describe what the tool does, make links to the materials it processes

Tool Capabilities/Limitations

  • Harware Details
    • Power specs
    • Chemicals
    • Gases
  • Capabilities
    • Resolution
    • Aspect Ratio
    • Thickness range

Substrate Requirements

  • Sample size range
    • Diameter
    • Thickness Precleans or other prerequisites


Material Restrictions

  • materials allowed
  • materials not allowed


Supported Processes

  • list supported processes/recipes (make links if applicable)
  • if applicable list other applicable processes, and/or describe how to write/edit custom recipes
  • describe example processes related to the tool (make links)

Operation

For more detailed operating instructions, read the [Tool Name SOP].

  1. Describe basic operating procedure
    1. Like the "cheat sheet" in the front of the log book

Possibly put the sop here?

Checkout Procedure

  1. List the SOP to read

Tool Qualification

Describe tool maintenance procedure/timeline and provide links to . Include any qualification information - e.g. repeatability, trends, etc.

Tool Location