Some at the top for what the tool is used for
Any current announcements
Describe what the tool does, make links to the materials it processes
- Harware Details
- Power specs
- Aspect Ratio
- Thickness range
- Sample size range
- Thickness Precleans or other prerequisites
- materials allowed
- materials not allowed
- list supported processes/recipes (make links if applicable)
- if applicable list other applicable processes, and/or describe how to write/edit custom recipes
- describe example processes related to the tool (make links)
For more detailed operating instructions, read the [Tool Name SOP].
- Describe basic operating procedure
- Like the "cheat sheet" in the front of the log book
Possibly put the sop here?
- List the SOP to read
Describe tool maintenance procedure/timeline and provide links to . Include any qualification information - e.g. repeatability, trends, etc.