Difference between revisions of "LAM 9400/Processes"

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*: An etch designed for polysilicon
 
*: An etch designed for polysilicon
 
*[[{{PAGENAME}}/LNF_Ti_thin]]
 
*[[{{PAGENAME}}/LNF_Ti_thin]]
 +
*[[{{PAGENAME}}/LNF_Aluminum]]

Revision as of 16:44, 18 December 2018

The LAM 9400 has a variety of processes available. There are standard supported recipes for poly, oxide and nitride, although there are many more materials etched via user created recipes.

Proccess List