Difference between revisions of "LAM 9400/Processes"

From LNF Wiki
Jump to navigation Jump to search
Line 5: Line 5:
 
==Description==
 
==Description==
  
Write a brief description of what this process is used for here.
+
The LAM 9400 has a variety of processes available.  There are standard supported recipes for poly, oxide and nitride, although there are many more materials etched by user created recipes.
 
 
 
Equipment: [[{{BASEPAGENAME}}]]
 
Equipment: [[{{BASEPAGENAME}}]]
  

Revision as of 13:38, 20 April 2015

Warning Warning: This page has not been released yet.

Description

The LAM 9400 has a variety of processes available. There are standard supported recipes for poly, oxide and nitride, although there are many more materials etched by user created recipes. Equipment: LAM 9400

Proccess List