Difference between revisions of "LAM 9400/Processes"
< LAM 9400
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===Proccess List=== | ===Proccess List=== | ||
*[[{{PAGENAME}}/mnf_oxide1]] | *[[{{PAGENAME}}/mnf_oxide1]] | ||
| − | *[[{{PAGENAME}}/ | + | *[[{{PAGENAME}}/mnf_oxynite2]] |
| + | *[[{{PAGENAME}}/mnf_nitride1]] | ||
| + | *[[{{PAGENAME}}/POLY_ETCH_2]] | ||
Revision as of 09:07, 7 April 2015
 Warning: | This page has not been released yet. |
Description
Write a brief description of what this process is used for here.
Equipment: LAM 9400
