Difference between revisions of "LNF Sputter Adding New Films"
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==Source Requirements== | ==Source Requirements== | ||
| + | [http://www.lesker.com/newweb/deposition_materials/depositionmaterials_technicalnotes_1.cfm?pgid=0 Sputter Targets Technical Notes] | ||
| − | === | + | ===TORUS® Circular HV (High Vacuum) Magnetron Sputtering Sources=== |
| + | |||
| + | [http://www.lesker.com/newweb/deposition_sources/torus_sputtercathodes_circularhv.cfm TORUS® Magnetron Sputtering Sources] | ||
===TORUS® Mag Keeper™=== | ===TORUS® Mag Keeper™=== | ||
| Line 19: | Line 22: | ||
[http://www.lesker.com/newweb/deposition_sources/torus_sputtercathodes_circularmagkeeper.cfm Mag Keeper] | [http://www.lesker.com/newweb/deposition_sources/torus_sputtercathodes_circularmagkeeper.cfm Mag Keeper] | ||
| − | Superuser access provides access to: | + | ===Superuser access provides access to:=== |
*Target change | *Target change | ||
| Line 30: | Line 33: | ||
** Co-Sputtered films | ** Co-Sputtered films | ||
** Applied bias voltages | ** Applied bias voltages | ||
| − | |||
| − | |||
==Training== | ==Training== | ||
Revision as of 12:17, 23 February 2017
The Lab 18's have two access categories, user and superuser. User level access allows access to the standard recipes where as superuser access allows users to change targets, run variable parameter recipe and create private recipes.
Contents
Requesting new materials
- See the Requesting a new material tutorial for specifics.
Source Requirements
Sputter Targets Technical Notes
TORUS® Circular HV (High Vacuum) Magnetron Sputtering Sources
TORUS® Magnetron Sputtering Sources
TORUS® Mag Keeper™
Superuser access provides access to:
- Target change
- Modify and run VP (variable parameter) recipes
- Create and support private recipes
- Support and train colleagues
- Custom film development
- Reactive sputtering
- Heated recipes (up to 350°C)
- Co-Sputtered films
- Applied bias voltages
Training
All training and checkout should be managed via the LNF helpdesk.
User Training
To gain access to the Lab 18's read and follow this checkout procedure:
- Read the tool SOP on the tool page.
- Pass the User Training Quiz
- Complete user tool training
- Create a Helpdesk ticket to schedule a time
- Or receive training from another Lab 18 user
- Complete user tool checkout
- Create a Help Desk Ticket to schedule a time
Technician Access
- Read the tool SOP on the tool page.
- Pass the Technician Training Quiz
- Technician Training Quiz Lab 18
- Technician Training Quiz PVD 75 ~Not Released
- Create a Help Desk Ticket to request your results.
Superuser Access
Please create a helpdesk ticket if you would like to be trained as a superuser.
