Difference between revisions of "LNF Sputter Adding New Films"

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==Source Requirements==
 
==Source Requirements==
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[https://docs.google.com/document/d/1297-5eFdidtdaJpOSoPE0r_Ogqx0XAjAbBFel-lIrr4/view Private and Co-Sputtering at the LNF]
 
[http://www.lesker.com/newweb/deposition_materials/depositionmaterials_technicalnotes_1.cfm?pgid=0 Sputter Targets Technical Notes]
 
[http://www.lesker.com/newweb/deposition_materials/depositionmaterials_technicalnotes_1.cfm?pgid=0 Sputter Targets Technical Notes]
  

Revision as of 12:20, 23 February 2017

Back to Lab 18-1

Back to Lab 18-2

Back to PVD 75

The Lab 18's have two access categories, user and superuser. User level access allows access to the standard recipes where as superuser access allows users to change targets, run variable parameter recipe and create private recipes.

Requesting new materials

Source Requirements

Private and Co-Sputtering at the LNF Sputter Targets Technical Notes

TORUS® Circular HV (High Vacuum) Magnetron Sputtering Sources

TORUS® Magnetron Sputtering Sources

TORUS® Mag Keeper™

Mag Keeper

Superuser access provides access to:

  • Target change
  • Modify and run VP (variable parameter) recipes
  • Create and support private recipes
  • Support and train colleagues
  • Custom film development
    • Reactive sputtering
    • Heated recipes (up to 350°C)
    • Co-Sputtered films
    • Applied bias voltages

Training

All training and checkout should be managed via the LNF helpdesk.

User Training

To gain access to the Lab 18's read and follow this checkout procedure:

  1. Read the tool SOP on the tool page.
  2. Pass the User Training Quiz
  3. Complete user tool training
    1. Create a Helpdesk ticket to schedule a time
    2. Or receive training from another Lab 18 user
  4. Complete user tool checkout
  5. Create a Help Desk Ticket to schedule a time

Technician Access

  1. Read the tool SOP on the tool page.
  2. Pass the Technician Training Quiz
  3. Create a Help Desk Ticket to request your results.

Superuser Access

Please create a helpdesk ticket if you would like to be trained as a superuser.