Difference between revisions of "LNF Sputter Adding New Films"

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** Applied bias voltages
** Applied bias voltages
All training and checkout should be managed via the [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:61071}} LNF helpdesk].
All training and checkout should be managed via the [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:61071}} LNF helpdesk].
=====User Training=====
=====Superuser Training is required=====
To gain access to the Lab 18's read and follow this checkout procedure:
#Read the tool SOP on the tool page.
#Pass the User Training Quiz
#*[https://docs.google.com/forms/d/e/1FAIpQLSevGEsCoP5aNyADbDpt3_7tflfn_1mZNA-EM2lOOA0doqYbyw/viewform?embedded=true#start=embed| Lab 18 User Training Quiz]
#*[https://docs.google.com/forms/d/e/1FAIpQLSejdgAcE9d7_fgmUWHDxykaoB4GpflVnP9anXV2gMXnoUscGw/viewform?embedded=true#start=embed| PVD 75 User Training Quiz]
#Complete user tool training
##Create a Helpdesk ticket to schedule a time
##Or receive training from another Lab 18 user
#Complete user tool checkout
#Create a Help Desk Ticket to schedule a time
====Technician Access====
#Read the tool SOP on the tool page.
#Pass the Technician Training Quiz
#*[https://docs.google.com/forms/d/e/1FAIpQLSfbXyLlwzFm5STBDYFNgZiFkI7A2_kBasw2HPUoiYEzaGCDdg/viewform?embedded=true#start=embed| Technician Training Quiz Lab 18]
#*Technician Training Quiz PVD 75 ~Not Released
#Create a Help Desk Ticket to request your results.
====Superuser Access====
Please create a helpdesk ticket if you would like to be trained as a superuser.
[[Category:PVD equipment]]
[[Category:PVD equipment]]

Revision as of 12:37, 23 February 2017

Back to Lab 18-1

Back to Lab 18-2

Back to PVD 75

The Lab 18's have two access categories, user and superuser. User level access allows access to the standard recipes where as superuser access allows users to change targets, run variable parameter recipe and create private recipes.

Requesting new materials

The functionality of this program... Helps promote research

  • Create a request using the New Sputter Material Request Form.
  • Create a helpdesk ticket to inform LNF staff of your request and to provide them with a forum to communicate with you.
  • Your request will be reviewed by the LNF management and staff.

See the Requesting a new material tutorial for specifics.

Source Requirements

Private and Co-Sputtering at the LNF

Sputter Targets Technical Notes

TORUS® Circular HV (High Vacuum) Magnetron Sputtering Sources

TORUS® Magnetron Sputtering Sources

TORUS® Mag Keeper™

Mag Keeper

Superuser access provides access to:

  • Target change
  • Modify and run VP (variable parameter) recipes
  • Create and support private recipes
  • Support and train colleagues
  • Custom film development
    • Reactive sputtering
    • Heated recipes (up to 350°C)
    • Co-Sputtered films
    • Applied bias voltages


All training and checkout should be managed via the LNF helpdesk.

Superuser Training is required