Difference between revisions of "Lab 18 Superuser Access"
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| Line 11: | Line 11: | ||
==Supported Processes== | ==Supported Processes== | ||
| + | * Support and Train Colleagues | ||
* Target Change | * Target Change | ||
| − | * | + | * Private Recipe Development |
| − | * Heated Recipes (up to 350C) | + | ** Heated Recipes (up to 350C) |
| − | * Reactive Sputtering | + | ** Reactive Sputtering |
| − | * Substrate Bias | + | ** Substrate Bias |
| + | ** Non Supported Materials | ||
| + | ** Multi Source Sputtering | ||
| + | ===Support and Train Colleagues=== | ||
| + | |||
| + | ===Target Change=== | ||
Superusers have the ability to change the targets in the tool on designated days. | Superusers have the ability to change the targets in the tool on designated days. | ||
| − | ===Private | + | ===Private Film Development=== |
| − | + | * Private Recipe Development | |
| − | * Private | + | ** Heated Recipes (up to 350C) |
| + | ** Reactive Sputtering | ||
| + | ** Substrate Bias | ||
** Non Supported Materials | ** Non Supported Materials | ||
** Multi Source Sputtering | ** Multi Source Sputtering | ||
| − | |||
| − | |||
| − | |||
| − | |||
| − | |||
| − | |||
===Qualification=== | ===Qualification=== | ||
| + | See KJLC Sputter Tool Access and Training page for qualification details. | ||
==Access and Training== | ==Access and Training== | ||
Revision as of 11:52, 26 January 2018
 Warning: | This page has not been released yet. |
Contents
Program Overview
The Lab 18 Superuser Program is in place to support sputter development beyond the standard supported films the LNF has posted at the tool. There is an additional training session meant to equip users with a better understanding on the inner working of the sputtering process in the Lab 18's.
Supported Processes
- Support and Train Colleagues
- Target Change
- Private Recipe Development
- Heated Recipes (up to 350C)
- Reactive Sputtering
- Substrate Bias
- Non Supported Materials
- Multi Source Sputtering
Support and Train Colleagues
Target Change
Superusers have the ability to change the targets in the tool on designated days.
Private Film Development
- Private Recipe Development
- Heated Recipes (up to 350C)
- Reactive Sputtering
- Substrate Bias
- Non Supported Materials
- Multi Source Sputtering
Qualification
See KJLC Sputter Tool Access and Training page for qualification details.
Access and Training
Tool reservations can be made using the LNF Scheduler
- See the Creating a Reservation for Lab 18 tutorial for specifics on reservation types.
Super User Training
In order to gain "superuser" access to the Lab 18's, you must complete the following:
- Read all Super User Training Material
- Pass the Super User Training Quiz
- Complete super user tool training
- Option 1)Create a Help Desk Ticket to schedule a time
- Option 2)Receive training from another Lab 18 super user
- Complete super user tool checkout with LNF Staff
- Create a Help Desk Ticket to schedule a time
Superuser Documents
References
List any external references or attachments related to this technology.
