Difference between revisions of "Laurell Spinner"
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|overview = [[{{PAGENAME}}#System_overview | System Overview]] | |overview = [[{{PAGENAME}}#System_overview | System Overview]] | ||
| − | |sop = [ | + | |sop = [https://docs.google.com/document/d/1Kp3A7BHqHK_PZbwdd69DMjHJ19Nvh6DctSwj3d4H2yw/preview SOP] |
|processes = [[{{PAGENAME}}/Processes|SU-8 2100, 2050, 2005, 2010, Polyimide 2610 and 2611]] | |processes = [[{{PAGENAME}}/Processes|SU-8 2100, 2050, 2005, 2010, Polyimide 2610 and 2611]] | ||
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|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]] | |maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]] | ||
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==Announcements== | ==Announcements== | ||
| − | * | + | * Aluminum foil on the lid helps with the cleaning. If users do not want to use it is fine, as long as the tool is throoughly claned after use |
| + | |||
| + | * When spinning a thin phtoresist we recommend to remove the aluminum foil or puddles formed during spinning will empty when opening the lid and ruin the sample | ||
| + | |||
| + | * Users spinning '''Polyimide''' must be '''extra''' careful and '''make sure spinner is clean after use'''. Polyimide dries up and forms flakes that will deposit ruin the freshly spun film. | ||
==Capabilities== | ==Capabilities== | ||
<!--A more general description of what the tool is capable of doing.--> | <!--A more general description of what the tool is capable of doing.--> | ||
| − | * | + | * Can spin 100 mm, 150 mm, glass slides and pieces |
| − | * | + | * wafer aligner tool |
| − | * | + | |
| − | * | + | '''Chemicals Spinned in this Bench''' |
| + | *SU-8 | ||
| + | *Polyimide | ||
| + | *PDMS | ||
| + | *Photoresist for dicing protection | ||
==System overview== | ==System overview== | ||
===Hardware details=== | ===Hardware details=== | ||
| − | * | + | * This tool is exhausted |
| − | * | + | * There are different chucks for wafers (100 mm and 150 mm use same chuck), glass slides and pieces |
| − | * | + | * The spinner door must be closed and vacuum must be on to operate the tool |
| − | * | + | * Users MUST clean the bowl and lid throroughly after each use |
| − | |||
| − | |||
===Substrate requirements=== | ===Substrate requirements=== | ||
| − | * Wafer | + | * Wafer must cover the chuck used completely. If not photoresist will be aspirated down the vacuum hole and eventually clog it |
| − | * | + | * Back of the wafer MUST be clean or vacuum will not be good enough for the spinner to operate |
| − | * | + | * Square samples will not spin a uniform film, material will accumulate on the corners, consider this and surface tension of the fluid when choosing the substrate |
| − | |||
===Material restrictions=== | ===Material restrictions=== | ||
| − | + | When spinning a material not listed above, contact tool engineer. | |
==Supported processes== | ==Supported processes== | ||
<!-- We recommend creating a subpage detailing the supported processes for the tool, which will be generated if you leave the link below. Alternatively, you may include the information on this page. In that case, the Supported Processes document from the equipment manual can be included here, using {{#widget:GoogleDoc|key=googledocid}} --> | <!-- We recommend creating a subpage detailing the supported processes for the tool, which will be generated if you leave the link below. Alternatively, you may include the information on this page. In that case, the Supported Processes document from the equipment manual can be included here, using {{#widget:GoogleDoc|key=googledocid}} --> | ||
| − | There are several | + | There are several recipes supported by the LNF, Recipe 0 - 11 these recipes can not be changed. Recipes 12 - 20 can be modified by the users. |
| − | + | Training includes how to modify or create recipes | |
| − | |||
| − | |||
==Standard operating procedure== | ==Standard operating procedure== | ||
<!-- To include a document from google docs, use the line below, replace "googledocid" with the ID for the document. Remember, to make this visible, you must set Sharing for the document to "Anyone with the link can view". --> | <!-- To include a document from google docs, use the line below, replace "googledocid" with the ID for the document. Remember, to make this visible, you must set Sharing for the document to "Anyone with the link can view". --> | ||
| − | {{#widget:GoogleDoc|key= | + | {{#widget:GoogleDoc|key=1Kp3A7BHqHK_PZbwdd69DMjHJ19Nvh6DctSwj3d4H2yw}} |
==Checkout procedure== | ==Checkout procedure== | ||
<!-- Describe the checkout procedure for the tool. For example: --> | <!-- Describe the checkout procedure for the tool. For example: --> | ||
| − | # Read through this page and the | + | # Read through this page and the [https://docs.google.com/document/d/1Kp3A7BHqHK_PZbwdd69DMjHJ19Nvh6DctSwj3d4H2yw/preview Standard Operating Procedure] above. |
| − | |||
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training. | # Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training. | ||
# A tool engineer will schedule a time for initial training. | # A tool engineer will schedule a time for initial training. | ||
# Practice with your mentor or another authorized user until you are comfortable with tool operation. | # Practice with your mentor or another authorized user until you are comfortable with tool operation. | ||
| − | |||
# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool. | # Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool. | ||
Latest revision as of 16:06, 18 October 2021
| Laurell Spinner | |
|---|---|
 Laurell Spinner Ws-650-23B | |
| Equipment Details | |
| Technology | Lithography |
| Materials Restriction | Metals |
| Chemicals Used | Photoresist, Polyimides, PDMS, other with approval |
| Equipment Manual | |
| Overview | System Overview |
| Operating Procedure | SOP |
| Supported Processes | SU-8 2100, 2050, 2005, 2010, Polyimide 2610 and 2611 |
| Maintenance | Maintenance |
The Laurell Spinner Laurell spinner is located in the ROBIN lab. A great variety of materials, that are not allowed to be spun in the clean room, can be spun here. This new tool replaces the old Solitec spinner and it is, as always, associated with the Solvent 94 bench. In order to reserve this tool users must reserve Solvent 94 bench. The main uses of this spinner are for soft lithography, polyimide processing and surface protection for dicing. There are just a few photoresist available for this tool, but users can bring private photoresist, or other spinnable materials provided they are approved.
Contents
Announcements
- Aluminum foil on the lid helps with the cleaning. If users do not want to use it is fine, as long as the tool is throoughly claned after use
- When spinning a thin phtoresist we recommend to remove the aluminum foil or puddles formed during spinning will empty when opening the lid and ruin the sample
- Users spinning Polyimide must be extra careful and make sure spinner is clean after use. Polyimide dries up and forms flakes that will deposit ruin the freshly spun film.
Capabilities
- Can spin 100 mm, 150 mm, glass slides and pieces
- wafer aligner tool
Chemicals Spinned in this Bench
- SU-8
- Polyimide
- PDMS
- Photoresist for dicing protection
System overview
Hardware details
- This tool is exhausted
- There are different chucks for wafers (100 mm and 150 mm use same chuck), glass slides and pieces
- The spinner door must be closed and vacuum must be on to operate the tool
- Users MUST clean the bowl and lid throroughly after each use
Substrate requirements
- Wafer must cover the chuck used completely. If not photoresist will be aspirated down the vacuum hole and eventually clog it
- Back of the wafer MUST be clean or vacuum will not be good enough for the spinner to operate
- Square samples will not spin a uniform film, material will accumulate on the corners, consider this and surface tension of the fluid when choosing the substrate
Material restrictions
When spinning a material not listed above, contact tool engineer.
Supported processes
There are several recipes supported by the LNF, Recipe 0 - 11 these recipes can not be changed. Recipes 12 - 20 can be modified by the users. Training includes how to modify or create recipes
Standard operating procedure
Widget text will go here.
Checkout procedure
- Read through this page and the Standard Operating Procedure above.
- Create a Helpdesk Ticket requesting training.
- A tool engineer will schedule a time for initial training.
- Practice with your mentor or another authorized user until you are comfortable with tool operation.
- Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
Maintenance
Process name
