View source for Nanoquest II Ion Mill

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{{infobox equipment
|manufacturer = [https://intlvac.com/ Intlvac Thin Film]
|model = Nanoquest II
|caption = 
|materials = 
|mask =
|size = 100 mm, 150 mm
|chemicals =
|gases = [[Ar]], [[O2|O<sub>2</sub>]], [[N2|N<sub>2</sub>]]
|overview = [[{{PAGENAME}}#System_overview | System Overview]]
|sop = not released <!--[https://link.to.google.doc/preview SOP]-->
|processes = [[{{PAGENAME}}/Processes|Supported Processes]]
|userprocesses = [[LNF_User:{{PAGENAME}}_user_processes|User Processes]]
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
}}

{{warning|This page has not been released yet.}}

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The [[{{PAGENAME}}]] is a...

==Announcements==
None at this time.

==Capabilities==
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* Etch rates of < 2 nm/min up to > 40 nm/min for a wide variety of materials

==System overview==
===Hardware details===
* Source Gases
** [[Ar]] - 50 sccm
** [[O2|O<sub>2</sub>]] - 50 sccm
** [[N2|N<sub>2</sub>]] - 50 sccm
* Gas Ring
** [[O2|O<sub>2</sub>]] - 50 sccm
** [[N2|N<sub>2</sub>]] - 50 sccm
{{note|Each gas can be delivered to either the source or gas ring, but not both}}
* Pressure
** Ebara EMT3300MK turbo pump
** Base pressure < 10<sup>-7</sup>
* Actively cooled platen with Dri-chuck mounting system
** 100 mm and 150 mm chucks available
** 5°C - 40°C range
* KRI RFICP220 gridded ion source
** Beam current up to 1500 mA
** Beam voltage up to 1000 V
* 3" dia RF magnetron sputter cathode

===Substrate requirements===
* 100 mm or 150 mm wafers
** Smaller samples may be mounted to a carrier wafer at the [[sample mounting station]]
** 3 mm max height {{dubious}}

===Material restrictions===
{{material restrictions}}

==Supported processes== 
{{main|{{PAGENAME}}/Processes}}

Initial characterization data for several recipes provided by the vendor are shown in the table below. Data is for thermal oxide and SPR 220. Uniformity data is from the thermal oxide measurement on 150 mm wafers with 10 mm edge exclusion.

{|class="wikitable sortable" style="text-align:center"
|- 
! Recipe Name !! Oxide Etch Rate<br/>(nm/min) !! SPR 220 Etch Rate<br/>(nm/min) !! Uniformity<br/>(10 mm EE)
|-
| style="text-align:left" | LNF_200VB_165IB_40VA  || 3.4  || 1.8  || 4.1%
|-
| style="text-align:left" | LNF_300VB_320IB_60VA  || 8.9  ||      || 4.5% 
|-
| style="text-align:left" | LNF_400VB_510IB_80VA  || 16.6 || 14.2 || 3.9%
|-
| style="text-align:left" | LNF_500VB_740IB_100VA || 27.2 || 21.7 || 4.9%
|-
| style="text-align:left" | LNF_600VB_500IB_120VA || 23.2 || 18.6 || 1.5%
|-
| style="text-align:left" | LNF_600VB_990IB_120VA || 40.2 || 35.1 || 3.1%
|-
| style="text-align:left" | LNF_800VB_500IB_160VA || style="color: red;" | 25.4 || || 3.9%
|}

{{note|For all process questions, fill out the [https://docs.google.com/forms/d/e/1FAIpQLSf4FcYP1XIoE-scXpXtmaegIzceSVe3uaR8e9P3K3LQAvn20w/viewform process request form] and create a helpdesk ticket.|reminder}}

<!-- If you allow custom recipes, let users know to contact a tool engineer, and you may also create the link below which will create a page that users can add custom recipes to.
In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} user processes]]. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.-->

==Standard operating procedure==
{{note|This SOP is still currently a draft. Please use caution when using the tool and take note of any additional information or changes provided by the tool engineer.|error}}
{{#widget:GoogleDoc|key=1j8K-iHGOmzttY0evotZVnLViYATzzBc3wD9zD-pr6O8}}

==Checkout procedure==
# Complete the [[Sample_mounting#Training_modules|sample mounting course]].  If you have already completed this for another tool, you do not need to complete it again.
# Read through this page and the Standard Operating Procedure above.
# Complete the [https://docs.google.com/forms/d/e/1FAIpQLSf4FcYP1XIoE-scXpXtmaegIzceSVe3uaR8e9P3K3LQAvn20w/viewform process request form].
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training.
# A tool engineer will schedule a time for initial training.
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.

==Maintenance== 
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===Process name===
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