Difference between revisions of "Nanoquest II Ion Mill"

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|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
 
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
 
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}}
 
{{warning|This page has not been released yet.}}
 
  
 
<!-- Insert the tool description here -->
 
<!-- Insert the tool description here -->
The [[{{PAGENAME}}]] is a...
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The [[{{PAGENAME}}]] is an ion beam etching (ion milling) system manufactured by Intlvac Thin Film Corporation. It is used for non-reactive, anisotropic etching of thin films particularly for difficult to etch materials. It is capable of etch rates from 2 to 40 nm per minute (material dependent).
  
 
==Announcements==
 
==Announcements==
{{note|Currently, use of this tool is restricted to users with high priority deadlines and who are assisting with etch rate characterization. If you believe your process falls into these categories, please create a helpdesk ticket. There will be extensive initial training and practice due to the limited documentation currently published for the tool.|error}}
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None at this time.
  
 
==Capabilities==
 
==Capabilities==
 
<!--A more general description of what the tool is capable of doing.-->
 
<!--A more general description of what the tool is capable of doing.-->
* Etch rates of <2 nm/min up to >40 nm/min for a wide variety of materials
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* Etch rates of < 2 nm/min up to > 40 nm/min for a wide variety of materials
  
 
==System overview==
 
==System overview==
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==Supported processes==  
 
==Supported processes==  
<!-- We recommend creating a subpage detailing the supported processes for the tool, which will be generated if you leave the link below. Alternatively, you may include the information on this page. In that case, the Supported Processes document from the equipment manual can be included here, using {{#widget:GoogleDoc|key=googledocid}} -->
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{{main|{{PAGENAME}}/Processes}}
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Initial characterization data for several recipes provided by the vendor are shown in the table below. Data is for thermal oxide and SPR 220. Uniformity data is from the thermal oxide measurement on 150 mm wafers with 10 mm edge exclusion.
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{|class="wikitable sortable" style="text-align:center"
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|-
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! Recipe Name !! Oxide Etch Rate<br/>(nm/min) !! SPR 220 Etch Rate<br/>(nm/min) !! Uniformity<br/>(10 mm EE)
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|-
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| style="text-align:left" | LNF_200VB_165IB_40VA  || 3.4  || 1.8  || 4.1%
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|-
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| style="text-align:left" | LNF_300VB_320IB_60VA  || 8.9  ||      || 4.5%
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|-
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| style="text-align:left" | LNF_400VB_510IB_80VA  || 16.6 || 14.2 || 3.9%
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|-
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| style="text-align:left" | LNF_500VB_740IB_100VA || 27.2 || 21.7 || 4.9%
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|-
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| style="text-align:left" | LNF_600VB_500IB_120VA || 23.2 || 18.6 || 1.5%
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|-
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| style="text-align:left" | LNF_600VB_990IB_120VA || 40.2 || 35.1 || 3.1%
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|-
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| style="text-align:left" | LNF_800VB_500IB_160VA || style="color: red;" | 25.4 || || 3.9%
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|}
  
There are several processes for this tool supported by the LNF, which are described in more detail on the [[/Processes/]] page.
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{{note|For all process questions, fill out the [https://docs.google.com/forms/d/e/1FAIpQLSf4FcYP1XIoE-scXpXtmaegIzceSVe3uaR8e9P3K3LQAvn20w/viewform process request form] and create a helpdesk ticket.|reminder}}
  
<!-- If you allow custom recipes, let users know to contact a tool engineer, and you may also create the link below which will create a page that users can add custom recipes to. -->
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<!-- If you allow custom recipes, let users know to contact a tool engineer, and you may also create the link below which will create a page that users can add custom recipes to.
In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} user processes]]. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.
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In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} user processes]]. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.-->
  
 
==Standard operating procedure==
 
==Standard operating procedure==
<!-- To include a document from google docs, use the line below, replace "googledocid" with the ID for the document. Remember, to make this visible, you must set Sharing for the document to "Anyone with the link can view". -->
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{{note|This SOP is still currently a draft. Please use caution when using the tool and take note of any additional information or changes provided by the tool engineer.|error}}
{{#widget:GoogleDoc|key=1uEOe2y17LWWYWknJb8xiF6oAEcbNvh-lalyo69wzpao}}
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{{#widget:GoogleDoc|key=1j8K-iHGOmzttY0evotZVnLViYATzzBc3wD9zD-pr6O8}}
  
 
==Checkout procedure==
 
==Checkout procedure==
Please create a helpdesk ticket if you have an urgent, high priority need for the tool and include as much process information as possible. A staff member will contact you regarding your process and schedule.
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# Complete the [[Sample_mounting#Training_modules|sample mounting course]].  If you have already completed this for another tool, you do not need to complete it again.
<!-- Describe the checkout procedure for the tool. For example:
 
 
# Read through this page and the Standard Operating Procedure above.
 
# Read through this page and the Standard Operating Procedure above.
# Complete the training request form [http://examplelink.com here].
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# Complete the [https://docs.google.com/forms/d/e/1FAIpQLSf4FcYP1XIoE-scXpXtmaegIzceSVe3uaR8e9P3K3LQAvn20w/viewform process request form].
 
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training.
 
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training.
 
# A tool engineer will schedule a time for initial training.
 
# A tool engineer will schedule a time for initial training.
 
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
 
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
# Complete the SOP quiz [http://examplelink.com here].
 
 
# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
 
# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
-->
 
  
 
==Maintenance==  
 
==Maintenance==  

Latest revision as of 17:36, 6 December 2021

Nanoquest II Ion Mill
Equipment Details
Manufacturer Intlvac Thin Film
Model Nanoquest II
Technology Ion milling
Materials Restriction Metals
Sample Size 100 mm, 150 mm
Gases Used Ar, O2, N2
Equipment Manual
Overview System Overview
Operating Procedure not released
Supported Processes Supported Processes
User Processes User Processes
Maintenance Maintenance


The Nanoquest II Ion Mill is an ion beam etching (ion milling) system manufactured by Intlvac Thin Film Corporation. It is used for non-reactive, anisotropic etching of thin films particularly for difficult to etch materials. It is capable of etch rates from 2 to 40 nm per minute (material dependent).

Announcements

None at this time.

Capabilities

  • Etch rates of < 2 nm/min up to > 40 nm/min for a wide variety of materials

System overview

Hardware details

  • Source Gases
    • Ar - 50 sccm
    • O2 - 50 sccm
    • N2 - 50 sccm
  • Gas Ring
    • O2 - 50 sccm
    • N2 - 50 sccm
Each gas can be delivered to either the source or gas ring, but not both
  • Pressure
    • Ebara EMT3300MK turbo pump
    • Base pressure < 10-7
  • Actively cooled platen with Dri-chuck mounting system
    • 100 mm and 150 mm chucks available
    • 5°C - 40°C range
  • KRI RFICP220 gridded ion source
    • Beam current up to 1500 mA
    • Beam voltage up to 1000 V
  • 3" dia RF magnetron sputter cathode

Substrate requirements

Material restrictions

The Nanoquest II Ion Mill is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.


Supported processes

Initial characterization data for several recipes provided by the vendor are shown in the table below. Data is for thermal oxide and SPR 220. Uniformity data is from the thermal oxide measurement on 150 mm wafers with 10 mm edge exclusion.

Recipe Name Oxide Etch Rate
(nm/min)
SPR 220 Etch Rate
(nm/min)
Uniformity
(10 mm EE)
LNF_200VB_165IB_40VA 3.4 1.8 4.1%
LNF_300VB_320IB_60VA 8.9 4.5%
LNF_400VB_510IB_80VA 16.6 14.2 3.9%
LNF_500VB_740IB_100VA 27.2 21.7 4.9%
LNF_600VB_500IB_120VA 23.2 18.6 1.5%
LNF_600VB_990IB_120VA 40.2 35.1 3.1%
LNF_800VB_500IB_160VA 25.4 3.9%
For all process questions, fill out the process request form and create a helpdesk ticket.


Standard operating procedure

This SOP is still currently a draft. Please use caution when using the tool and take note of any additional information or changes provided by the tool engineer.

Widget text will go here.

Checkout procedure

  1. Complete the sample mounting course. If you have already completed this for another tool, you do not need to complete it again.
  2. Read through this page and the Standard Operating Procedure above.
  3. Complete the process request form.
  4. Create a Helpdesk Ticket requesting training.
  5. A tool engineer will schedule a time for initial training.
  6. Practice with your mentor or another authorized user until you are comfortable with tool operation.
  7. Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.

Maintenance

Process name