Difference between revisions of "Nanoquest II Ion Mill"
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|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]] | |maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]] | ||
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<!-- Insert the tool description here --> | <!-- Insert the tool description here --> | ||
| − | The [[{{PAGENAME}}]] is | + | The [[{{PAGENAME}}]] is an ion beam etching (ion milling) system manufactured by Intlvac Thin Film Corporation. It is used for non-reactive, anisotropic etching of thin films particularly for difficult to etch materials. It is capable of etch rates from 2 to 40 nm per minute (material dependent). |
==Announcements== | ==Announcements== | ||
| − | + | None at this time. | |
==Capabilities== | ==Capabilities== | ||
<!--A more general description of what the tool is capable of doing.--> | <!--A more general description of what the tool is capable of doing.--> | ||
| − | * Etch rates of <2 nm/min up to >40 nm/min for a wide variety of materials | + | * Etch rates of < 2 nm/min up to > 40 nm/min for a wide variety of materials |
==System overview== | ==System overview== | ||
| Line 63: | Line 61: | ||
==Supported processes== | ==Supported processes== | ||
| − | + | {{main|{{PAGENAME}}/Processes}} | |
| + | |||
| + | Initial characterization data for several recipes provided by the vendor are shown in the table below. Data is for thermal oxide and SPR 220. Uniformity data is from the thermal oxide measurement on 150 mm wafers with 10 mm edge exclusion. | ||
| + | |||
| + | {|class="wikitable sortable" style="text-align:center" | ||
| + | |- | ||
| + | ! Recipe Name !! Oxide Etch Rate<br/>(nm/min) !! SPR 220 Etch Rate<br/>(nm/min) !! Uniformity<br/>(10 mm EE) | ||
| + | |- | ||
| + | | style="text-align:left" | LNF_200VB_165IB_40VA || 3.4 || 1.8 || 4.1% | ||
| + | |- | ||
| + | | style="text-align:left" | LNF_300VB_320IB_60VA || 8.9 || || 4.5% | ||
| + | |- | ||
| + | | style="text-align:left" | LNF_400VB_510IB_80VA || 16.6 || 14.2 || 3.9% | ||
| + | |- | ||
| + | | style="text-align:left" | LNF_500VB_740IB_100VA || 27.2 || 21.7 || 4.9% | ||
| + | |- | ||
| + | | style="text-align:left" | LNF_600VB_500IB_120VA || 23.2 || 18.6 || 1.5% | ||
| + | |- | ||
| + | | style="text-align:left" | LNF_600VB_990IB_120VA || 40.2 || 35.1 || 3.1% | ||
| + | |- | ||
| + | | style="text-align:left" | LNF_800VB_500IB_160VA || style="color: red;" | 25.4 || || 3.9% | ||
| + | |} | ||
| − | + | {{note|For all process questions, fill out the [https://docs.google.com/forms/d/e/1FAIpQLSf4FcYP1XIoE-scXpXtmaegIzceSVe3uaR8e9P3K3LQAvn20w/viewform process request form] and create a helpdesk ticket.|reminder}} | |
| − | <!-- If you allow custom recipes, let users know to contact a tool engineer, and you may also create the link below which will create a page that users can add custom recipes to. | + | <!-- If you allow custom recipes, let users know to contact a tool engineer, and you may also create the link below which will create a page that users can add custom recipes to. |
| − | In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} user processes]]. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system. | + | In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} user processes]]. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.--> |
==Standard operating procedure== | ==Standard operating procedure== | ||
| − | + | {{note|This SOP is still currently a draft. Please use caution when using the tool and take note of any additional information or changes provided by the tool engineer.|error}} | |
| − | {{#widget:GoogleDoc|key= | + | {{#widget:GoogleDoc|key=1j8K-iHGOmzttY0evotZVnLViYATzzBc3wD9zD-pr6O8}} |
==Checkout procedure== | ==Checkout procedure== | ||
| − | + | # Complete the [[Sample_mounting#Training_modules|sample mounting course]]. If you have already completed this for another tool, you do not need to complete it again. | |
| − | |||
# Read through this page and the Standard Operating Procedure above. | # Read through this page and the Standard Operating Procedure above. | ||
| − | # Complete the | + | # Complete the [https://docs.google.com/forms/d/e/1FAIpQLSf4FcYP1XIoE-scXpXtmaegIzceSVe3uaR8e9P3K3LQAvn20w/viewform process request form]. |
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training. | # Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training. | ||
# A tool engineer will schedule a time for initial training. | # A tool engineer will schedule a time for initial training. | ||
# Practice with your mentor or another authorized user until you are comfortable with tool operation. | # Practice with your mentor or another authorized user until you are comfortable with tool operation. | ||
| − | |||
# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool. | # Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool. | ||
| − | |||
==Maintenance== | ==Maintenance== | ||
Latest revision as of 16:36, 6 December 2021
| Nanoquest II Ion Mill | |
|---|---|
| Equipment Details | |
| Manufacturer | Intlvac Thin Film |
| Model | Nanoquest II |
| Technology | Ion milling |
| Materials Restriction | Metals |
| Sample Size | 100 mm, 150 mm |
| Gases Used | Ar, O2, N2 |
| Equipment Manual | |
| Overview | System Overview |
| Operating Procedure | not released |
| Supported Processes | Supported Processes |
| User Processes | User Processes |
| Maintenance | Maintenance |
The Nanoquest II Ion Mill is an ion beam etching (ion milling) system manufactured by Intlvac Thin Film Corporation. It is used for non-reactive, anisotropic etching of thin films particularly for difficult to etch materials. It is capable of etch rates from 2 to 40 nm per minute (material dependent).
Contents
Announcements
None at this time.
Capabilities
- Etch rates of < 2 nm/min up to > 40 nm/min for a wide variety of materials
System overview
Hardware details
Each gas can be delivered to either the source or gas ring, but not both
- Pressure
- Ebara EMT3300MK turbo pump
- Base pressure < 10-7
- Actively cooled platen with Dri-chuck mounting system
- 100 mm and 150 mm chucks available
- 5°C - 40°C range
- KRI RFICP220 gridded ion source
- Beam current up to 1500 mA
- Beam voltage up to 1000 V
- 3" dia RF magnetron sputter cathode
Substrate requirements
- 100 mm or 150 mm wafers
- Smaller samples may be mounted to a carrier wafer at the sample mounting station
- 3 mm max height[dubious ]
Material restrictions
The Nanoquest II Ion Mill is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.
Approved materials
Supported processes
Main article: Nanoquest II Ion Mill/Processes
Initial characterization data for several recipes provided by the vendor are shown in the table below. Data is for thermal oxide and SPR 220. Uniformity data is from the thermal oxide measurement on 150 mm wafers with 10 mm edge exclusion.
| Recipe Name | Oxide Etch Rate (nm/min) |
SPR 220 Etch Rate (nm/min) |
Uniformity (10 mm EE) |
|---|---|---|---|
| LNF_200VB_165IB_40VA | 3.4 | 1.8 | 4.1% |
| LNF_300VB_320IB_60VA | 8.9 | 4.5% | |
| LNF_400VB_510IB_80VA | 16.6 | 14.2 | 3.9% |
| LNF_500VB_740IB_100VA | 27.2 | 21.7 | 4.9% |
| LNF_600VB_500IB_120VA | 23.2 | 18.6 | 1.5% |
| LNF_600VB_990IB_120VA | 40.2 | 35.1 | 3.1% |
| LNF_800VB_500IB_160VA | 25.4 | 3.9% |
For all process questions, fill out the process request form and create a helpdesk ticket.
Standard operating procedure
This SOP is still currently a draft. Please use caution when using the tool and take note of any additional information or changes provided by the tool engineer.
Widget text will go here.
Checkout procedure
- Complete the sample mounting course. If you have already completed this for another tool, you do not need to complete it again.
- Read through this page and the Standard Operating Procedure above.
- Complete the process request form.
- Create a Helpdesk Ticket requesting training.
- A tool engineer will schedule a time for initial training.
- Practice with your mentor or another authorized user until you are comfortable with tool operation.
- Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
Maintenance
Process name
