Difference between revisions of "Nanoquest II Ion Mill"
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==Checkout procedure== | ==Checkout procedure== | ||
| − | + | # Complete the [[Sample_mounting#Training_modules|sample mounting course]]. If you have already completed this for another tool, you do not need to complete it again. | |
| − | |||
# Read through this page and the Standard Operating Procedure above. | # Read through this page and the Standard Operating Procedure above. | ||
| − | # Complete the | + | # Complete the [https://docs.google.com/forms/d/e/1FAIpQLSf4FcYP1XIoE-scXpXtmaegIzceSVe3uaR8e9P3K3LQAvn20w/viewform process request form]. |
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training. | # Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training. | ||
# A tool engineer will schedule a time for initial training. | # A tool engineer will schedule a time for initial training. | ||
# Practice with your mentor or another authorized user until you are comfortable with tool operation. | # Practice with your mentor or another authorized user until you are comfortable with tool operation. | ||
| − | |||
# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool. | # Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool. | ||
| − | |||
==Maintenance== | ==Maintenance== | ||
Revision as of 18:40, 23 May 2021
| Nanoquest II Ion Mill | |
|---|---|
| Equipment Details | |
| Manufacturer | Intlvac Thin Film |
| Model | Nanoquest II |
| Technology | Ion milling |
| Materials Restriction | Metals |
| Sample Size | 100 mm, 150 mm |
| Gases Used | Ar, O2, N2 |
| Equipment Manual | |
| Overview | System Overview |
| Operating Procedure | not released |
| Supported Processes | Supported Processes |
| User Processes | User Processes |
| Maintenance | Maintenance |
 Warning: | This page has not been released yet. |
The Nanoquest II Ion Mill is a...
Contents
Announcements
None at this time.
Capabilities
- Etch rates of < 2 nm/min up to > 40 nm/min for a wide variety of materials
System overview
Hardware details
Each gas can be delivered to either the source or gas ring, but not both
- Pressure
- Ebara EMT3300MK turbo pump
- Base pressure < 10-7
- Actively cooled platen with Dri-chuck mounting system
- 100 mm and 150 mm chucks available
- 5°C - 40°C range
- KRI RFICP220 gridded ion source
- Beam current up to 1500 mA
- Beam voltage up to 1000 V
- 3" dia RF magnetron sputter cathode
Substrate requirements
- 100 mm or 150 mm wafers
- Smaller samples may be mounted to a carrier wafer at the sample mounting station
- 3 mm max height[dubious ]
Material restrictions
The Nanoquest II Ion Mill is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.
Approved materials
Supported processes
Main article: Nanoquest II Ion Mill/Processes
Initial characterization data for several recipes provided by the vendor are shown in the table below. Data is for thermal oxide and SPR 220. Uniformity data is from the thermal oxide measurement on 150 mm wafers with 10 mm edge exclusion.
| Recipe Name | Oxide Etch Rate (nm/min) |
SPR 220 Etch Rate (nm/min) |
Uniformity (10 mm EE) |
|---|---|---|---|
| LNF_200VB_165IB_40VA | 3.4 | 1.8 | 4.1% |
| LNF_300VB_320IB_60VA | 8.9 | 4.5% | |
| LNF_400VB_510IB_80VA | 16.6 | 14.2 | 3.9% |
| LNF_500VB_740IB_100VA | 27.2 | 21.7 | 4.9% |
| LNF_600VB_500IB_120VA | 23.2 | 18.6 | 1.5% |
| LNF_600VB_990IB_120VA | 40.2 | 35.1 | 3.1% |
| LNF_800VB_500IB_160VA | 25.4 | 3.9% |
Standard operating procedure
This SOP is still currently a draft. Please use caution when using the tool and take note of any additional information or changes provided by the tool engineer.
Widget text will go here.
Checkout procedure
- Complete the sample mounting course. If you have already completed this for another tool, you do not need to complete it again.
- Read through this page and the Standard Operating Procedure above.
- Complete the process request form.
- Create a Helpdesk Ticket requesting training.
- A tool engineer will schedule a time for initial training.
- Practice with your mentor or another authorized user until you are comfortable with tool operation.
- Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
Maintenance
Process name
