Nickel

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Nickel (Ni) is an element with the atomic number 28. It is silvery-white and lustrous in appearance with a slightly golden tinge. Nickel is a transition metal and is a very hard and ductile material.

Equipment

Process technologies that can be used to deposit/pattern this material.

Deposition Equipment

• Tools in the LNF for depositing this material.
  • Angstrom Engineering Evovac Evaporator
  • Cooke Evaporator
  • SJ-20 Evaporator

Etching Equipment

• Wet Etching
  • Acid Bench 92
  • Acid Bench 12
  • Acid Bench 73
• RIE
  • Nanoquest II Ion Mill

Characterization Equipment

• Metrology/Characterization equipment available in the LNF for measuring physical, optical, and surface properties of this material.

Applications

• Discuss common uses/applications for this material. Why this materials is used in the LNF?

Processes

Deposition Processes

• List of technologies for depositing this material and relevant process information specific to this material associated with this equipment/type of process.

Etching Processes

• Nickel can be etched with Piranha Etch (380 nm/min), dilute Aqua Regia (100 nm/min)

Characterization Processes

• List of techniques for metrology/characterization can be used with this material and relevant process information specific to this material associated with this equipment/type of process.

Technical Data

• Charts or specific LNF related data for this material.

References

• KR Williams, K Gupta, M Wasilik, "Etch Rates for Micromachining Processing - Part II", JMEMS vol. 12 No 6, Dec 2003