Difference between revisions of "Octafluorocyclobutane"

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* [[P5000 RIE]]
 
* [[P5000 RIE]]
 
* [[LAM 9400]]
 
* [[LAM 9400]]
* [[Oxford ICP RIE]]
 
  
 
==Safety Data Sheet==
 
==Safety Data Sheet==

Latest revision as of 13:22, 20 July 2018

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C4F8 is used for RIE processes as a passivation agent. It XXXX

Equipment

Safety Data Sheet

References