PMMA
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PMMA is a positive e-beam lithography resist from MicroChem. The LNF offers the 950 series in several viscosities.
Processes
PMMA processes vary depending on the design requirements. A few examples that work for many situations are listed below. For assistance characterizing a PMMA process, please create a helpdesk ticket.
Spin Curve
- There are currently no process SOPs defined for this chemical.
Equipment
PMMA spinning and baking should be performed in the E-Beam Spinner/Hot-Plate Bench. Exposure is done with the JEOL E-Beam. Development is done at the E-Beam Solvent Bench.
| Process | Thickness (nm) | Notes |
|---|---|---|
| PMMA A4 4krpm | 200 | What's it good for? |
| row 2, cell 1 | row 2, cell 2 | row 2, cell 3 |
Technical Data Sheet
Safety Data Sheet
- There are currently no Safety Data Sheets (SDSes) for this chemical.
