PSC 122M Mask Cleaner
The PSC 122M Mask Cleaner is a standardized solution for submicron cleaning of Photomasks, reticles, and substrates. The PSC 122M Mask Cleaner is a cost effective system that utilizes high pressure De-ionized water spray along with an optional surfactant dispense and brush, that allows for cleaning. The drying technique uses a variable spin with nitrogen and a heat lamp.
| PSC 122M Mask Cleaner | |
|---|---|
 Mask Cleaner | |
| Equipment Details | |
| Technology | Wafer Clean |
| Materials Restriction | Metals |
| Material Processed | n/a |
| Mask Materials | 4", 5", 7" |
| Sample Size | 4" wafers, 6" wafers |
| Chemicals Used | Micro 90 |
| Gases Used | n/a |
| Equipment Manual | |
| Overview | System Overview |
| Operating Procedure | SOP |
| Supported Processes | Supported Processes |
| User Processes | User Processes |
| Maintenance | Maintenance |
Contents
Announcements
- [7/30/2024] PSC 122M is currently offline while system is switched over from a vacuum pump to the LNF's house vacuum system.
Capabilities
Cleaning of substrates such as masks and wafers
System overview
Hardware details
- The surfactant used in this system is: Micro 90
- N2 blowoff
- Heater for drying
Substrate requirements
Masks are clipped in and wafers are held on using a vacuum pulldown. Chucks can be added and removed with 2 screws. There are chucks available for the following sizes:
- 4" wafers
- 6" wafers
- 4" masks
- 5" masks
- 7" masks
Material restrictions
The PSC 122M Mask Cleaner is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.
Supported processes
There are several recipes for this tool supported by the LNF, a list of processes can be found in the tool SOP found below.
Users are permitted to change Recipe #6 ONLY. Recipe #6 is a designated custom recipe slot wherein users can enter custom-recipe parameters to meet their cleaning needs. Editing Recipes #1 through #5 will result in immediate loss of access to the tool.
If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.
Standard operating procedure
Full Standard Operating Procedure Widget text will go here.
Quick Reference Standard Operating Procedure The quick reference SOP will be printed and placed at the tool Widget text will go here.
Checkout procedure
- Read through this page and the Standard Operating Procedure above.
- Complete the Mask Cleaner Quiz.
- Find an available time for checkout here.
- Verify that the tool is available in the LNF Online Services at the time you are requesting.
- After confirmation that the event is scheduled in Calendly, invite the staff member assigned to your event to a Staff Support reservation at that time.
- Create a helpdesk ticket for final confirmation of your checkout appointment.
- If you pass the quiz the tool engineer will authorize you on the tool. If not you will be contacted to repeat.