Difference between revisions of "Piranha Etch"

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==Chemicals==
 
==Chemicals==
*[[https://docs.google.com/a/lnf.umich.edu/file/d/0B8WeTTMTotIfV2pXRlhLVDBSTnVDdFhyU1JKZlFqUQ/preview] Sulfuric Acid]]
+
*[[https://docs.google.com/a/lnf.umich.edu/file/d/0B8WeTTMTotIfV2pXRlhLVDBSTnVDdFhyU1JKZlFqUQ/preview|Sulfuric Acid]]
 +
*[{UP(Public.SEM In-line)}In-LineSEMToolSOP.pdf|Tool SOP]
 
*Hydrogen Peroxide
 
*Hydrogen Peroxide
  

Revision as of 13:19, 13 May 2015

Warning Warning: This page has not been released yet.
About this Process
Process Details
Equipment Piranha Etch
Technology [[]]
Chemicals Used Sulfuric Acid, Hydrogen Peroxide
Date Created 5/12/15
Date Modified 5/12/15
Authored By Rob Hower



Chemicals

  • [Acid]
  • [{UP(Public.SEM In-line)}In-LineSEMToolSOP.pdf|Tool SOP]
  • Hydrogen Peroxide

Locations

Characterization

Etch Rate

Will clean organic residue off of wafer in approximately 10-20 min

Mask Selectivity

Limitations

Will attack any polymers on the surface