Plasmatherm 790/Processes

From LNF Wiki
Jump to navigation Jump to search

This page lists the processes supported by the LNF for the Plasmatherm 790.

Process List

RIE

PECVD

The Plasmatherm has 3 oxide recipes available, at 200°C, and 350°C.

There are also 2 nitride recipes available, at 200°C, and 350°C. These have the index and stress optimized.

Then there is also 1 oxynitride recipe at 350°C. It is designed to have minimal stress.