Plasmatherm 790/Processes/L nit350

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l_nit350 is a higher temp nitride deposition recipe for the Plasmatherm 790. It is optimized to have a stress near 25 MPa and an index of 2.0.

About this Process
Process Details
Equipment Plasmatherm 790
Technology PECVD
Material Si3N4
Gases Used SiH4, NH3, N2, He


Deposition Rate 27.9 nm/min
Index of Refraction 1.999
Stress 10 MPa

Qualification is done with a 5 minute run, max allowed thickness of 2µm.


Parameter Dep
RF Power 150 W
Pressure 1500 mTorr
NH3 Flow 1.43 sccm
N2 Flow 160 sccm
He Flow 490 sccm
SiH4 Flow 5 sccm
Temperature 350°C