Plasmatherm 790/Processes/L ox200
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l_ox200 is a lower temp oxide deposition recipe for the Plasmatherm 790.
| About this Process | |
|---|---|
| Process Details | |
| Equipment | Plasmatherm 790 |
| Technology | PECVD |
| Material | SiO2 |
| Gases Used | SiH4, N2O, He |
Parameters
| Parameter | Dep |
|---|---|
| RF Power | 150 W |
| Pressure | 1000 mTorr |
| SiH4 Flow | 3.0 sccm |
| N2O Flow | 250 sccm |
| He Flow | 150 sccm |
| Temperature | 200°C |
Capabilities
| Parameter | |
|---|---|
| Deposition Rate | 7.5 Å/sec |
| Index of Refraction | 1.466 |
| Stress | -325 MPa |
This process is qualified with a 5 min run. The max allowed thickness is 2µm.
