Plasmatherm 790/Processes/L ox200

From LNF Wiki
< Plasmatherm 790‎ | Processes
Revision as of 10:35, 28 October 2021 by Wrightsh (talk | contribs) (→‎Capabilities)
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to navigation Jump to search

l_ox200 is a lower temp oxide deposition recipe for the Plasmatherm 790.

About this Process
Process Details
Equipment Plasmatherm 790
Technology PECVD
Material SiO2
Gases Used SiH4, N2O, He



Capabilities

Parameter
Deposition Rate 48 nm/min
Index of Refraction 1.469
Stress -350 MPa

This process is qualified with a 5 min run. The max allowed thickness is 2µm.

Parameters

Parameter Dep
RF Power 150 W
Pressure 1000 mTorr
SiH4 Flow 3.0 sccm
N2O Flow 250 sccm
He Flow 150 sccm
Temperature 200°C