View source for Platinum

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Platinum (Pt) is a chemical element with the atomic number of 78. It is a malleable, ductile, dense, unreactive transition metal that appears silver-ish in appearance.  Platinum is characterized by being one of the least reactive metals that is also very resistant to corrosion. Electrical properties are also very stable.

==Equipment==
Process technologies that can be used to deposit/pattern this material.  If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.
===Deposition Equipment===
*[[Lab 18-1|Lab 18-1]]
*[[Lab 18-2]]
*[[Angstrom Engineering Evovac Evaporator]]
*[[Enerjet Evaporator]]
*[[Veeco Fiji ALD]]

===Etching Equipment===
* Wet Etching
** [[Acid Bench 73]]
** [[Acid Bench 12]]
** [[Acid Bench 92]]

===Characterization Equipment===
*Metrology/Characterization equipment available in the LNF for measuring physical, optical, and surface properties of this material.

==Applications==
*Discuss common uses/applications for this material. Why this materials is used in the LNF?

==Processes==
===Deposition Processes===
*[[Electron_beam_evaporation|E-beam evaporation]]

*[[Sputter_deposition|Sputter deposition]]

===Etching Processes===
* Wet Etching
** While platinum is insoluble in both hydrochloric and nitric acid on their own, it is dissolved in heated [[Aqua Regia]].

*[[RIE]]
**Tool material restriction must be considered when selecting an RIE tool as it will impact what tools you can use for future process steps.
**RIE will give straighter sidewalls and less undercut than wet etching.

===Characterization Processes===
* List of techniques for metrology/characterization can be used with this material and relevant process information specific to this material associated with this equipment/type of process.

==Other Relevant Material Information==
==Technical Data==
*Charts or specific LNF related data for this material.

==References==
*Citations/references for this material, review articles. If possible, examples of users publications which includes the material.