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Platinum (Pt) is a chemical element with the atomic number of 78. It is a malleable, ductile, dense, unreactive transition metal that appears silver-ish in appearance. Platinum is characterized by being one of the least reactive metals that is also very resistant to corrosion. Electrical properties are also very stable.


Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.

Deposition Equipment

Etching Equipment

Characterization Equipment

  • Metrology/Characterization equipment available in the LNF for measuring physical, optical, and surface properties of this material.


  • Discuss common uses/applications for this material. Why this materials is used in the LNF?


Deposition Processes

Etching Processes

  • Wet Etching
    • While platinum is insoluble in both hydrochloric and nitric acid on their own, it is dissolved in heated Aqua Regia.
  • RIE
    • Tool material restriction must be considered when selecting an RIE tool as it will impact what tools you can use for future process steps.
    • RIE will give straighter sidewalls and less undercut than wet etching.

Characterization Processes

  • List of techniques for metrology/characterization can be used with this material and relevant process information specific to this material associated with this equipment/type of process.

Other Relevant Material Information

Technical Data

  • Charts or specific LNF related data for this material.


  • Citations/references for this material, review articles. If possible, examples of users publications which includes the material.