SPR 955

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SPR 955 is an I-line series of photoresists developed by microchem.

Processes

SPR 955 (0.9)

borderless

  1. Vapor prime wafer with HMDS
  2. Spin at 3,000 RPM
  3. Bake at 100°C for 60 sec
  4. Expose
  5. Bake at 110°C for 60 sec
  6. Develop

Spin Curve

The following spin curve is for the CEE 100CB photoresist spinner. For other spinners, please measure the thickness before processing.

Technical Data Sheet

SPR 955 Datasheet

Safety Data Sheet

  • There are currently no Safety Data Sheets (SDSes) for this chemical.