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SPR 955 is an I-line series of photoresists developed by microchem.
SPR 955 (0.9)
- Vapor prime wafer with HMDS
- Spin at 3,000 RPM
- ACS 200 cluster tool - 1.0 sec 20 psi dispense
- Bake at 100°C for 60 sec
- Bake at 110°C for 60 sec
The following spin curve is for the CEE 100CB photoresist spinner. For other spinners, please measure the thickness before processing.
Technical Data Sheet
Safety Data Sheet
- There are currently no Safety Data Sheets (SDSes) for this chemical.