Difference between revisions of "STS Pegasus 4"

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The SPTS Pegasus 4 is a DRIE tool used to etch 4" silicon wafers.
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==Announcements==
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The SPTS Pegasus 4 is currently online and ready for processing. For day to day shutdowns please consult the helpdesk system on the scheduler.
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== System Overview ==
 
== System Overview ==

Revision as of 14:19, 1 May 2014

The SPTS Pegasus 4 is a DRIE tool used to etch 4" silicon wafers.

Announcements

The SPTS Pegasus 4 is currently online and ready for processing. For day to day shutdowns please consult the helpdesk system on the scheduler.


System Overview

Standard Operating Procedure