Difference between revisions of "STS Pegasus 4"
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| + | The SPTS Pegasus 4 is a DRIE tool used to etch 4" silicon wafers. | ||
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| + | ==Announcements== | ||
| + | The SPTS Pegasus 4 is currently online and ready for processing. For day to day shutdowns please consult the helpdesk system on the scheduler. | ||
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== System Overview == | == System Overview == | ||
Revision as of 13:19, 1 May 2014
The SPTS Pegasus 4 is a DRIE tool used to etch 4" silicon wafers.
Announcements
The SPTS Pegasus 4 is currently online and ready for processing. For day to day shutdowns please consult the helpdesk system on the scheduler.
System Overview
Standard Operating Procedure
