Difference between revisions of "STS Pegasus 4"

Revision as of 13:36, 1 May 2014

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The SPTS Pegasus 4 is a DRIE tool used to etch 4" silicon wafers.

The SPTS Pegasus 4 is currently online and ready for processing. For day to day shutdowns please consult the helpdesk system on the scheduler.

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	The SPTS Pegasus 4 is a DRIE tool used to etch 4" silicon wafers.		The SPTS Pegasus 4 is a DRIE tool used to etch 4" silicon wafers.