STS Pegasus 4
Revision as of 13:19, 1 May 2014 by Wrightsh
The SPTS Pegasus 4 is a DRIE tool used to etch 4" silicon wafers.
The SPTS Pegasus 4 is currently online and ready for processing. For day to day shutdowns please consult the helpdesk system on the scheduler.
Standard Operating Procedure