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STS Pegasus 4/Processes/LNF Ar Descum

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LNF Ar Descum uses an Ar plasma to anisotropically and indiscriminately remove a thin layer of any material on the surface of the sample. It is intended as a combination of photoresist descum and native oxide removal prior to Si etching. This recipe is already included in all of the standard recipes.

About this Process
Process Details
Equipment STS Pegasus 4
Technology RIE
Material all
Mask Materials none
Gases Used Argon


Contents

Procedure

LNF Ar Descum is included as the first process step in all standard processes, so it is not typically necessary to run as a standalone process.

The maximum etch time allowed for this process is 2 minutes.

Parameters

Parameter Units Setpoint
ICP Power W ?
Bias Power W ?
Bias Pulsing Hz 40 Hz - 80%
Pressure mTorr ?
Ar Flow sccm ?

Capabilities

Etch rate and uniformity

Material Etch Rate Uniformity
Silicon dioxide 100 Å/min 13%
Silicon nitride ? ?
Silicon ? ?
SPR 220 190 Å/min 8%

Mask Selectivity

This recipe is intended for blanket descum of the wafer surface, so a mask is not necessary.

Limitations

Maximum allowed etch time is 2 min.