STS Pegasus 4/Processes/LNF Oxynitride LF

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About this Process
Oxynitride lf.jpg
Process Details
Equipment STS Pegasus 4
Technology RIE
Material Si, SiO2, Si3N4
Mask Materials Photoresist
Gases Used SF6, C4F8, Ar
Date Created 10/10/2012
Authored By Brian Vanderelzen

The LNF Oxynitride LF is a recipe on the STS Pegasus 4 and 6 that may be used to etch silicon dioxide and silicon nitride. Because the tool is not designed for this process, it also etches silicon and photoresist at a similar rate. It is primarily useful for native oxide removal prior to a deep Si etch. For oxide film etching, such as preparing an etch mask, the STS Glass Etcher and P5000 RIE have far superior performance and are strongly recommended.


Follow the SOP outlined on the tool page. Run LNF Oxynitride LF for up to 20 minutes with the 1 minute automated clean recipe, longer etches should be run with the 3 minute automated clean recipe.


Parameter Units Setpoint
ICP Power W ?
Bias Power W 100?
Bias Pulsing Hz 40 Hz - 80%
Pressure mTorr 10?
C4F8 Flow sccm ?
SF6 Flow sccm ?
Ar Flow sccm ?


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This process is not recommended for most etch processes. There are other RIE tools in the lab with much better performance for oxide and nitride etching with higher selectivity to silicon and photoresist. Please create a helpdesk ticket or email if you have further questions.